| Presentation | 2004/1/29 Development of Failure Analysis Method Using Nano-prober and THIS Fumiko YANO, Hiroshi YANAGITA, Takayuki MIZUNO, Fumiko ARAKAWA, Yoshifumi OGAWA, Shohei TERADA, Kyouichiro ASAYAMA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The Nano-prober is our original tool which can give us electrical characteristics such as transistor I-V and metal resistivitiy of each individual circuit element of an LSI. The detailed structure of the failure suite, which was pinpointed by the Nanoprober, can be observed and/or analyzed by TEM (Transmission Electron Microscope). Examining electrical and structureal information of the exactly same failure site reveals the failure mechanism and help us to make effective countermeasures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nano-prober / Prober / SEM / TEM / Analytical TEM / Failure Analysis / Countermeasure |
| Paper # | CPM2003-164,ICD2003-203 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/1/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Failure Analysis Method Using Nano-prober and THIS |
| Sub Title (in English) | |
| Keyword(1) | Nano-prober |
| Keyword(2) | Prober |
| Keyword(3) | SEM |
| Keyword(4) | TEM |
| Keyword(5) | Analytical TEM |
| Keyword(6) | Failure Analysis |
| Keyword(7) | Countermeasure |
| 1st Author's Name | Fumiko YANO |
| 1st Author's Affiliation | Renesas Technology Corp.() |
| 2nd Author's Name | Hiroshi YANAGITA |
| 2nd Author's Affiliation | Renesas Technology Corp. |
| 3rd Author's Name | Takayuki MIZUNO |
| 3rd Author's Affiliation | Renesas Technology Corp. |
| 4th Author's Name | Fumiko ARAKAWA |
| 4th Author's Affiliation | Renesas Technology Corp. |
| 5th Author's Name | Yoshifumi OGAWA |
| 5th Author's Affiliation | Renesas Technology Corp. |
| 6th Author's Name | Shohei TERADA |
| 6th Author's Affiliation | Hitachi Research Laboratory, Hitachi Ltd. |
| 7th Author's Name | Kyouichiro ASAYAMA |
| 7th Author's Affiliation | Renesas Technology Corp. |
| Date | 2004/1/29 |
| Paper # | CPM2003-164,ICD2003-203 |
| Volume (vol) | vol.103 |
| Number (no) | 645 |
| Page | pp.pp.- |
| #Pages | 3 |
| Date of Issue | |