| Presentation | 2004/1/29 Pilot-Photon-Emission and Pilot-OBIRCH Analysis Methods for LSI Fault Isolation Tatsuya ISHI, Hirotoshi TERADA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The present conditions of two analysis methods (Pilot-photo-emission and Pilot-OBIRCH) were shown. The Pilot-photo-emission is possible to localize the defect position on the LSI chip with the positional resolution that exceeds the diffraction limit of optics. It was shown from the experiment that la of the observed position was 65nm under the positional resolution: 0.13 urn, accordingly this method provided the high observation accuracy. And the application to the actual failure of memory macro cells such as the embedded SRAM on ASIC devices was announced. The Pilot-OBIRCH is in the stage that the basic experiments are just started. The application to the failure analysis of the CMOS-LSI overall is being aimed in the both of methods. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Emission Microscopy / OBIRCH / Failure Analysis / LSI |
| Paper # | CPM2003-163,ICD2003-202 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/1/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Pilot-Photon-Emission and Pilot-OBIRCH Analysis Methods for LSI Fault Isolation |
| Sub Title (in English) | |
| Keyword(1) | Emission Microscopy |
| Keyword(2) | OBIRCH |
| Keyword(3) | Failure Analysis |
| Keyword(4) | LSI |
| 1st Author's Name | Tatsuya ISHI |
| 1st Author's Affiliation | Seiko Epson Corp.() |
| 2nd Author's Name | Hirotoshi TERADA |
| 2nd Author's Affiliation | Hamamatsu Photonics K.K. |
| Date | 2004/1/29 |
| Paper # | CPM2003-163,ICD2003-202 |
| Volume (vol) | vol.103 |
| Number (no) | 645 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |