| Presentation | 2003/11/3 NO_2 gas sensing properties of WO_3 sputtered film dependent on the film density Chengji JIN, Toshinari YAMAZAKI, Yashuyosi SHIRAI, Toshio KIKUTA, Noriyuki NAKATANI, Humio TAKEDA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to obtain high sensitivity to NO_2 gas, the effects of the porosity and noble metal additives (Au, Pt, Ru) were studied. WO_3 thin films have been deposited on the quartz substrates by reactive dc magnetron sputtering, and then annealed in air for 4h at 600℃. The film crystallographic structures and the surface morphologies were analyzed by XRD and AFM respectively. Sputtered Pt is used for the interdigital electrode and the gas sensing properties of WO_3 thin film to 3ppm NO_2 gas were investigated. The sensitivity is increased, as the substrate temperature decreased and the discharge gas pressure increased, while the film is porous and has a low film density. Au (0.25at.) doping and low film density causes high sensitivity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | WO_3 / Thin film / Sputtering / Film density / NO_2 gas / Gas sensor |
| Paper # | CPM2003-142 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/11/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | NO_2 gas sensing properties of WO_3 sputtered film dependent on the film density |
| Sub Title (in English) | |
| Keyword(1) | WO_3 |
| Keyword(2) | Thin film |
| Keyword(3) | Sputtering |
| Keyword(4) | Film density |
| Keyword(5) | NO_2 gas |
| Keyword(6) | Gas sensor |
| 1st Author's Name | Chengji JIN |
| 1st Author's Affiliation | Faculty of Engineering, Toyama University() |
| 2nd Author's Name | Toshinari YAMAZAKI |
| 2nd Author's Affiliation | Faculty of Engineering, Toyama University |
| 3rd Author's Name | Yashuyosi SHIRAI |
| 3rd Author's Affiliation | Faculty of Engineering, Toyama University |
| 4th Author's Name | Toshio KIKUTA |
| 4th Author's Affiliation | Faculty of Engineering, Toyama University |
| 5th Author's Name | Noriyuki NAKATANI |
| 5th Author's Affiliation | Faculty of Engineering, Toyama University |
| 6th Author's Name | Humio TAKEDA |
| 6th Author's Affiliation | Toyama National College of Technology |
| Date | 2003/11/3 |
| Paper # | CPM2003-142 |
| Volume (vol) | vol.103 |
| Number (no) | 411 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |