Presentation 2003/11/3
Preparation of Bi_2Sr_2CuO_x films on SrTiO_3/SrO buffered Si(001) substrates by molecular beam epitaxy technique
M. N. K. Bhuiyan, A. Matsuda, T. Yasumura, T. Tambo, C. Tatsuyama,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The evolution of oxidized Si(001) surface by Sr exposure and the subsequent growth of SrO, SrTiO_3(STO) and Bi_2Sr_2CuO_x (BSCO) films have been studied using reflection high-energy electron diffraction (RHEED), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and X-ray diffraction (XRD).The deposition was performed in a molecular beam epitaxy (MBE) chamber. The chemically formed SiO_2 layer on Si(001) substrates is removed at the substrate temperature of 800 ℃ under Sr exposure and a stable and well ordered (2×1) structure is clearly observed in the RHEED pattern. Epitaxial BSCO film does not grow directly on Si(001). Therefore, a double STO/SrO buffer layer is grown on the Si(001)-Sr(2×1) surface. XRD pattern indicates that the crystalline BSCO film grows on the STO/SrO/Si.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) BSCO films / MBE / SiO_2 layer / Sr exposure / Si(001) substrate / RHEED / XPS / AFM / XRD
Paper # CPM2003-139
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Committee CPM
Conference Date 2003/11/3(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparation of Bi_2Sr_2CuO_x films on SrTiO_3/SrO buffered Si(001) substrates by molecular beam epitaxy technique
Sub Title (in English)
Keyword(1) BSCO films
Keyword(2) MBE
Keyword(3) SiO_2 layer
Keyword(4) Sr exposure
Keyword(5) Si(001) substrate
Keyword(6) RHEED
Keyword(7) XPS
Keyword(8) AFM
Keyword(9) XRD
1st Author's Name M. N. K. Bhuiyan
1st Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyama University()
2nd Author's Name A. Matsuda
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyama University
3rd Author's Name T. Yasumura
3rd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyama University
4th Author's Name T. Tambo
4th Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyama University
5th Author's Name C. Tatsuyama
5th Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyama University
Date 2003/11/3
Paper # CPM2003-139
Volume (vol) vol.103
Number (no) 411
Page pp.pp.-
#Pages 5
Date of Issue