| Presentation | 2003/11/3 Low temperature growth of cubic GaN on GaAs(100) using hot-mesh CVD Yoshiaki Taima, Mitsuyoshi Ishibashi, Kanji Yasui, Tadashi Akahane, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Growth conditions for cubic type GaN films on GaAs substrates were investigated using hot-mesh CVD. Epitaxial growth was tried on the substrate surface nitrided by NH3 gas decomposed by tungsten (W) mesh at the best condition obtained in a previous study. Compared with the growth by hot filament CVD, GaN film with more preponderant cubic phase was grown at W-mesh temperature 1400, NH3 gas pressure 67Pa and substrate temperature 650. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hot-mesh CVD / cubic GaN / GaAs / Low temperature growth |
| Paper # | CPM2003-135 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/11/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low temperature growth of cubic GaN on GaAs(100) using hot-mesh CVD |
| Sub Title (in English) | |
| Keyword(1) | Hot-mesh CVD |
| Keyword(2) | cubic GaN |
| Keyword(3) | GaAs |
| Keyword(4) | Low temperature growth |
| 1st Author's Name | Yoshiaki Taima |
| 1st Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology() |
| 2nd Author's Name | Mitsuyoshi Ishibashi |
| 2nd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 3rd Author's Name | Kanji Yasui |
| 3rd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 4th Author's Name | Tadashi Akahane |
| 4th Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| Date | 2003/11/3 |
| Paper # | CPM2003-135 |
| Volume (vol) | vol.103 |
| Number (no) | 411 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |