Presentation | 2003/9/26 MOVPE Growth and Characterization of High-Al-Content Al_xGa_<1-x>N/GaN HEMT Layers on 100-mm-diameter Sapphire Substrates Makoto MIYOSHI, Masahiro SAKAI, Hiroyasu ISHIKAWA, Takashi EGAWA, Takashi JINBO, Mitsuhiro TANAKA, Osamu ODA, Hiroyuki KATSUKAWA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | For the practical use and the high-power applications of GaN-based electronic devices, we examined the growth of high-Al-content Al_xGa_<1-x>N/GaN (0.26 ≤ x_ |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Al_xGa_<1-x>N-GaN HEMT / high-Al-content Al_xGa_<1-x>N / MOVPE / 100-mm-diameter sapphire substrates / uniformity |
Paper # | ED2003-150,CPM2003-120,LQE2003-68 |
Date of Issue |
Conference Information | |
Committee | CPM |
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Conference Date | 2003/9/26(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
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Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | MOVPE Growth and Characterization of High-Al-Content Al_xGa_<1-x>N/GaN HEMT Layers on 100-mm-diameter Sapphire Substrates |
Sub Title (in English) | |
Keyword(1) | Al_xGa_<1-x>N-GaN HEMT |
Keyword(2) | high-Al-content Al_xGa_<1-x>N |
Keyword(3) | MOVPE |
Keyword(4) | 100-mm-diameter sapphire substrates |
Keyword(5) | uniformity |
1st Author's Name | Makoto MIYOSHI |
1st Author's Affiliation | Research Center for Nano-Device and System, Nagoya Institute of Technology:NGK INSULATORS, LTD.() |
2nd Author's Name | Masahiro SAKAI |
2nd Author's Affiliation | Research Center for Nano-Device and System, Nagoya Institute of Technology:NGK INSULATORS, LTD. |
3rd Author's Name | Hiroyasu ISHIKAWA |
3rd Author's Affiliation | Research Center for Nano-Device and System, Nagoya Institute of Technology |
4th Author's Name | Takashi EGAWA |
4th Author's Affiliation | Research Center for Nano-Device and System, Nagoya Institute of Technology |
5th Author's Name | Takashi JINBO |
5th Author's Affiliation | Research Center for Nano-Device and System, Nagoya Institute of Technology |
6th Author's Name | Mitsuhiro TANAKA |
6th Author's Affiliation | NGK INSULATORS, LTD. |
7th Author's Name | Osamu ODA |
7th Author's Affiliation | NGK INSULATORS, LTD. |
8th Author's Name | Hiroyuki KATSUKAWA |
8th Author's Affiliation | NGK INSULATORS, LTD. |
Date | 2003/9/26 |
Paper # | ED2003-150,CPM2003-120,LQE2003-68 |
Volume (vol) | vol.103 |
Number (no) | 344 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |