| Presentation | 2003/9/26 Characterization of optical filters and GaN based Schottky ultraviolet detector in vacuum ultraviolet and soft X-ray region Hironobu Watanabe, Atsushi Motogaito, Kazumasa Hiramatsu, Kazutoshi Fukui, Yutaka Hamamura, Kazuyuki Tadatomo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The characterization of freestanding thin film filters and GaN based Schottky ultraviolet (UV) detectors were carried out from vacuum ultraviolet (VUV) to soft X-ray (SX) region (25-100 eV, 12.4-50 nm). The high order light from grating of monochrometer was able to be eliminated by using Ti, Ti/Al/Ti and SiN thin films as a filter. Moreover, the transmittance of Schottky electrode Ni/Au calculated from that of Ti/Au membrane was about 50-70% in this wavelength region, and it is enough thin to transmit VUV and SX light. Measured using such a filter and transparent electrode, this detector can also detect VUV and SX light. The responsivity in VUV (30-50 nm) and SX region (@13 nm) was about 0.01 and 0.05 A/W, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / UV detector / freestanding thin film filters / soft X-ray |
| Paper # | ED2003-148,CPM2003-118,LQE2003-66 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/9/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of optical filters and GaN based Schottky ultraviolet detector in vacuum ultraviolet and soft X-ray region |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | UV detector |
| Keyword(3) | freestanding thin film filters |
| Keyword(4) | soft X-ray |
| 1st Author's Name | Hironobu Watanabe |
| 1st Author's Affiliation | Mie University() |
| 2nd Author's Name | Atsushi Motogaito |
| 2nd Author's Affiliation | Mie University |
| 3rd Author's Name | Kazumasa Hiramatsu |
| 3rd Author's Affiliation | Mie University |
| 4th Author's Name | Kazutoshi Fukui |
| 4th Author's Affiliation | Fukui University |
| 5th Author's Name | Yutaka Hamamura |
| 5th Author's Affiliation | Nikon Corporation |
| 6th Author's Name | Kazuyuki Tadatomo |
| 6th Author's Affiliation | Mitsubishi Cable Industries, LTD. |
| Date | 2003/9/26 |
| Paper # | ED2003-148,CPM2003-118,LQE2003-66 |
| Volume (vol) | vol.103 |
| Number (no) | 344 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |