| Presentation | 2003/9/26 Fabrication of Schottky UV photodetector based on Al_<0.5>Ga_<0.5>N and its spectral responsivity Hironori Yasukawa, Yoshihiro Kida, Akira Ishiga, Yasuhiro Shibata, Atsushi Motogaito, Hideto Miyake, Kazumasa Hiramatsu, Youichiro Ohuchi, Kazuyuki Tadatomo, Yutaka Hamamura, Kazutoshi Fukui, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The Schottky UV photodetectors were fabricated using a Al_<0.5>Ga_<0.5>N epilayer grown on epitaxial AlN film on sapphire by LP-MOVPE, and their electrical and optical properties were characterized. Responsivity had risen up sharply for 260nm (4.7eV) corresponding with a bandgap of Al_<0.5>Ga_<0.5>N. The responsivity of AlGaN photodetector per unit area at193nm (ArF) increased 16 times compared with that of GaN photodetector and we found that it had high responsivity in the vacuum ultraviolet (VUV) region. While, by inserting i-AlGaN layer between Schottky contact and n-AlGaN layer, dark current was decreased of 3 orders of magnitude and the responsivity had been improved. From these results, we confirmed that the Schottky UV photodetector based on Al_<0.5>Ga_<0.5>N epilayer is useful for detection in VUV region. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN / UV detector / AlN / Schottky contact |
| Paper # | ED2003-147,CPM2003-117,LQE2003-65 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/9/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Schottky UV photodetector based on Al_<0.5>Ga_<0.5>N and its spectral responsivity |
| Sub Title (in English) | |
| Keyword(1) | AlGaN |
| Keyword(2) | UV detector |
| Keyword(3) | AlN |
| Keyword(4) | Schottky contact |
| 1st Author's Name | Hironori Yasukawa |
| 1st Author's Affiliation | Mie University() |
| 2nd Author's Name | Yoshihiro Kida |
| 2nd Author's Affiliation | Mie University |
| 3rd Author's Name | Akira Ishiga |
| 3rd Author's Affiliation | Mie University |
| 4th Author's Name | Yasuhiro Shibata |
| 4th Author's Affiliation | Mie University |
| 5th Author's Name | Atsushi Motogaito |
| 5th Author's Affiliation | Mie University |
| 6th Author's Name | Hideto Miyake |
| 6th Author's Affiliation | Mie University |
| 7th Author's Name | Kazumasa Hiramatsu |
| 7th Author's Affiliation | Mie University |
| 8th Author's Name | Youichiro Ohuchi |
| 8th Author's Affiliation | Mitsubishi Cable Industries LTD. |
| 9th Author's Name | Kazuyuki Tadatomo |
| 9th Author's Affiliation | Mitsubishi Cable Industries LTD. |
| 10th Author's Name | Yutaka Hamamura |
| 10th Author's Affiliation | Nikon Corporation |
| 11th Author's Name | Kazutoshi Fukui |
| 11th Author's Affiliation | Fukui University |
| Date | 2003/9/26 |
| Paper # | ED2003-147,CPM2003-117,LQE2003-65 |
| Volume (vol) | vol.103 |
| Number (no) | 344 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |