| Presentation | 2003/4/18 Microfocus X-ray CT analysis method and Its application for high-density LSI packaging Akira HIRAKIMOTO, Tadahiro SHIOTA, Taketo KISHI, Masami , Masami EDAHIRO, Masayuki KAMEGAWA, Masaaki UKITA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the semiconductor related industries, micro focus x-ray computed tomographic systems are now being recognized as powerful quality control tools. Especially, the importance of three-dimensional non-destructive data is essential and indispensable to the technology progress of high-density LSI packaging. The latest systems with high resolution and high throughput will be shown in this paper. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Microfocus X-ray / X-ray Computed Tomography / High-density LSI / Three-dimensional non-destructive data / Inspection Technology |
| Paper # | RS2003-11,CPM2003-11,OPE2003-11 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/4/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Microfocus X-ray CT analysis method and Its application for high-density LSI packaging |
| Sub Title (in English) | |
| Keyword(1) | Microfocus X-ray |
| Keyword(2) | X-ray Computed Tomography |
| Keyword(3) | High-density LSI |
| Keyword(4) | Three-dimensional non-destructive data |
| Keyword(5) | Inspection Technology |
| 1st Author's Name | Akira HIRAKIMOTO |
| 1st Author's Affiliation | NDI Business Unit, Shimadzu Corp.() |
| 2nd Author's Name | Tadahiro SHIOTA |
| 2nd Author's Affiliation | NDI Business Unit, Shimadzu Corp. |
| 3rd Author's Name | Taketo KISHI |
| 3rd Author's Affiliation | NDI Business Unit, Shimadzu Corp. |
| 4th Author's Name | Masami |
| 4th Author's Affiliation | NDI Business Unit, Shimadzu Corp. |
| 5th Author's Name | Masami EDAHIRO |
| 5th Author's Affiliation | NDI Business Unit, Shimadzu Corp. |
| 6th Author's Name | Masayuki KAMEGAWA |
| 6th Author's Affiliation | NDI Business Unit, Shimadzu Corp. |
| 7th Author's Name | Masaaki UKITA |
| 7th Author's Affiliation | Technology Research Laboratory, Shimadzu Corp. |
| Date | 2003/4/18 |
| Paper # | RS2003-11,CPM2003-11,OPE2003-11 |
| Volume (vol) | vol.103 |
| Number (no) | 34 |
| Page | pp.pp.- |
| #Pages | 4 |
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