Presentation | 2003/7/25 Optical and electrical characteristics of Ge nanocrystals in SiO_2 film Kiyokatsu TAKEYA, Shinya OMAKI, Motokazu NISHINO, Hisashi FUKUDA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The purpose of this study is the application to nanocrystal memory noticed as a next generation non-volatility memory. We have fabricated germanium (Ge) nanocrystals self-assembled in silicon dioxide (SiO_2) film using electoron-beam vaper depositon, and investigated their crystallinities and optical characteristics. When Ge is deposited on SiO_2 and then heat-treated, it assembles in SiO_2, finally changes to nano-size crystals. The size of Ge nanocrystal obtained in this study was estimated in the range of 5.7 nm from the result of Raman spectroscopy measurement. Defect related emission from the Ge nanocrystals was observed at room temperature in the photoluminescence (PL) measurement. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | nanocrystal memory / SiO_2 film / Ge nanocrystal / defect of emission |
Paper # | CPM2003-64 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2003/7/25(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Optical and electrical characteristics of Ge nanocrystals in SiO_2 film |
Sub Title (in English) | |
Keyword(1) | nanocrystal memory |
Keyword(2) | SiO_2 film |
Keyword(3) | Ge nanocrystal |
Keyword(4) | defect of emission |
1st Author's Name | Kiyokatsu TAKEYA |
1st Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology() |
2nd Author's Name | Shinya OMAKI |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology |
3rd Author's Name | Motokazu NISHINO |
3rd Author's Affiliation | Hokkaido Polytechnic College |
4th Author's Name | Hisashi FUKUDA |
4th Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology |
Date | 2003/7/25 |
Paper # | CPM2003-64 |
Volume (vol) | vol.103 |
Number (no) | 245 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |