Presentation 2003/7/25
Optical and electrical characteristics of Ge nanocrystals in SiO_2 film
Kiyokatsu TAKEYA, Shinya OMAKI, Motokazu NISHINO, Hisashi FUKUDA,
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Abstract(in English) The purpose of this study is the application to nanocrystal memory noticed as a next generation non-volatility memory. We have fabricated germanium (Ge) nanocrystals self-assembled in silicon dioxide (SiO_2) film using electoron-beam vaper depositon, and investigated their crystallinities and optical characteristics. When Ge is deposited on SiO_2 and then heat-treated, it assembles in SiO_2, finally changes to nano-size crystals. The size of Ge nanocrystal obtained in this study was estimated in the range of 5.7 nm from the result of Raman spectroscopy measurement. Defect related emission from the Ge nanocrystals was observed at room temperature in the photoluminescence (PL) measurement.
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Keyword(in English) nanocrystal memory / SiO_2 film / Ge nanocrystal / defect of emission
Paper # CPM2003-64
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Committee CPM
Conference Date 2003/7/25(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Optical and electrical characteristics of Ge nanocrystals in SiO_2 film
Sub Title (in English)
Keyword(1) nanocrystal memory
Keyword(2) SiO_2 film
Keyword(3) Ge nanocrystal
Keyword(4) defect of emission
1st Author's Name Kiyokatsu TAKEYA
1st Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology()
2nd Author's Name Shinya OMAKI
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology
3rd Author's Name Motokazu NISHINO
3rd Author's Affiliation Hokkaido Polytechnic College
4th Author's Name Hisashi FUKUDA
4th Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology
Date 2003/7/25
Paper # CPM2003-64
Volume (vol) vol.103
Number (no) 245
Page pp.pp.-
#Pages 6
Date of Issue