Presentation 2002/5/16
Realization of High-quality thick AlGaN layers and its device application
Motoaki IWAYA, Tomoaki SANO, Shinji TERAO, Shingo MOCHIDUKI, Sigekazu SANO, Tetsuya NAKAMURA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI,
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Abstract(in English) We reported the new three growth technique for realization of low threading dislocation density and crack-free Al_xGa_1-xN films. We found that there was a big correlation in the threading dislocation density and the PL intensity in the GaN/AlGaN MQWs. This new UV light emitting diode exhibits strong UV light output, having peak wavelength of 363nm, a full width at half maximum as narrow as 4.8nm and output power of 2.6mW at 100 mA DC current injection.
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Keyword(in English) AlGaN / LT-AlN interlayer / dislocation / lateral growth / μ-PL / UV-LED
Paper # CPM2002-10
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Committee CPM
Conference Date 2002/5/16(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Realization of High-quality thick AlGaN layers and its device application
Sub Title (in English)
Keyword(1) AlGaN
Keyword(2) LT-AlN interlayer
Keyword(3) dislocation
Keyword(4) lateral growth
Keyword(5) μ-PL
Keyword(6) UV-LED
1st Author's Name Motoaki IWAYA
1st Author's Affiliation Faculty of Science and Technology, Meijo University()
2nd Author's Name Tomoaki SANO
2nd Author's Affiliation Faculty of Science and Technology, Meijo University
3rd Author's Name Shinji TERAO
3rd Author's Affiliation Faculty of Science and Technology, Meijo University
4th Author's Name Shingo MOCHIDUKI
4th Author's Affiliation Faculty of Science and Technology, Meijo University
5th Author's Name Sigekazu SANO
5th Author's Affiliation Faculty of Science and Technology, Meijo University
6th Author's Name Tetsuya NAKAMURA
6th Author's Affiliation Faculty of Science and Technology, Meijo University
7th Author's Name Satoshi KAMIYAMA
7th Author's Affiliation Faculty of Science and Technology, Meijo University:High-Tech Research Center, Meijo University
8th Author's Name Hiroshi AMANO
8th Author's Affiliation Faculty of Science and Technology, Meijo University:High-Tech Research Center, Meijo University
9th Author's Name Isamu AKASAKI
9th Author's Affiliation Faculty of Science and Technology, Meijo University:High-Tech Research Center, Meijo University
Date 2002/5/16
Paper # CPM2002-10
Volume (vol) vol.102
Number (no) 78
Page pp.pp.-
#Pages 8
Date of Issue