| Presentation | 2003/2/21 Fabrication of Patterned Media using Self-organizing Block copolymers and Nanoimprint Lithography Hiroyuki HIEDA, Msatoshi SAKURAI, Yoshiyuki KAMATA, Akira KIKITSU, Kohji ASAKAWA, Katsuyuki NAITO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Magnetic patterned media which had magnetic dots aligned circumferentially on whole region of 2.5 inch glass disk substrates were fabricated. Block copolymer templates were used as etching masks for ion milling of magnetic films. Grooves on resist films which were patterned by nanoimprinting technique aligned the orientation of self-organized patterns of phase-separated block copolymers. Arrays of CoPt and CoCrPt dots with 40 nm-diameter, 50 nm-height and 80 nm-pitch aligned circumferential tracks were obtained by this method. The dots were revealed to have perpendicular magnetic anisotropy with single magnetic domain. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Self-Assembly / Block copolymer / Nanoimprint |
| Paper # | CPM2002-172 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Patterned Media using Self-organizing Block copolymers and Nanoimprint Lithography |
| Sub Title (in English) | |
| Keyword(1) | Self-Assembly |
| Keyword(2) | Block copolymer |
| Keyword(3) | Nanoimprint |
| 1st Author's Name | Hiroyuki HIEDA |
| 1st Author's Affiliation | Toshiba Corp.Corporate R&D Center() |
| 2nd Author's Name | Msatoshi SAKURAI |
| 2nd Author's Affiliation | Toshiba Corp.Corporate R&D Center |
| 3rd Author's Name | Yoshiyuki KAMATA |
| 3rd Author's Affiliation | Toshiba Corp.Corporate R&D Center |
| 4th Author's Name | Akira KIKITSU |
| 4th Author's Affiliation | Toshiba Corp.Corporate R&D Center |
| 5th Author's Name | Kohji ASAKAWA |
| 5th Author's Affiliation | Toshiba Corp.Corporate R&D Center |
| 6th Author's Name | Katsuyuki NAITO |
| 6th Author's Affiliation | Toshiba Corp.Corporate R&D Center |
| Date | 2003/2/21 |
| Paper # | CPM2002-172 |
| Volume (vol) | vol.102 |
| Number (no) | 664 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |