| Presentation | 2003/2/21 Deep-UV Near Field Exposure for Optical Disk Mastering Shingo Imanishi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Near-field mastering process was realized with a 266 nm laser and a solid immersion lens (SIL) of 1.35 numerical aperture (NA). For an objective, one of molded aspherical lenses with a wave front error (WFE) of below 70 mλrms was assembled with a supersphere SIL of about 25 mλrms WFE. The distance between the SIL and the glassmaster, or the air gap, was detected with using a 532 nm laser and it was servo-controlled at about 100 nm by driving the objective with an air-suspended pad and a PZT actuator. A residual fluctuation of the air gap was constrained within 10 nmPP. As a result of read only memory (ROM) recording in a density corresponding to 40 gigabytes (GB) in compact disc (CD) size, a clear pit pattern was fabricated. As for 25 GB ROM recording, acceptable signal quality was obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Near-Field / Mastering / Exposure with a 266 nm Laser / Gap Detection with a 532 nm Laser / Detection by Total Internal Reflection / Air-suspended Pad / PZT Actuator |
| Paper # | CPM2002-170 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deep-UV Near Field Exposure for Optical Disk Mastering |
| Sub Title (in English) | |
| Keyword(1) | Near-Field |
| Keyword(2) | Mastering |
| Keyword(3) | Exposure with a 266 nm Laser |
| Keyword(4) | Gap Detection with a 532 nm Laser |
| Keyword(5) | Detection by Total Internal Reflection |
| Keyword(6) | Air-suspended Pad |
| Keyword(7) | PZT Actuator |
| 1st Author's Name | Shingo Imanishi |
| 1st Author's Affiliation | Optical Disk Development Division,AV/IT Development Group,SONY Corporation() |
| Date | 2003/2/21 |
| Paper # | CPM2002-170 |
| Volume (vol) | vol.102 |
| Number (no) | 664 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |