| Presentation | 2003/2/21 50GB Dual Layer ROM Disc by EB recording Masahiko TSUKUDA, Eiichi ITO, Yuko KAWAGUCHI, Morio TOMIYAMA, Shinya ABE, Shigeru FURUMIYA, Eiji OHNO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a 50 GB dual layer read only memory (ROM) disc made by electron beam recording. The practical recording velocity was realized by control of the recording pulse and the adjustment of the post exposure bake (PEB) condition for the chemically amplified resist. The recording condition was optimized for each layer. A replication process of dual layer ROM disc for production was developed. A sufficient jitter value was obtained for each layer from fabricated disc. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | read only memory disc / EBR / chemically amplified resist / post exposure bake / dual layer |
| Paper # | CPM2002-169 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2003/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 50GB Dual Layer ROM Disc by EB recording |
| Sub Title (in English) | |
| Keyword(1) | read only memory disc |
| Keyword(2) | EBR |
| Keyword(3) | chemically amplified resist |
| Keyword(4) | post exposure bake |
| Keyword(5) | dual layer |
| 1st Author's Name | Masahiko TSUKUDA |
| 1st Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd.() |
| 2nd Author's Name | Eiichi ITO |
| 2nd Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd. |
| 3rd Author's Name | Yuko KAWAGUCHI |
| 3rd Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd. |
| 4th Author's Name | Morio TOMIYAMA |
| 4th Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd. |
| 5th Author's Name | Shinya ABE |
| 5th Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd. |
| 6th Author's Name | Shigeru FURUMIYA |
| 6th Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd. |
| 7th Author's Name | Eiji OHNO |
| 7th Author's Affiliation | Storage Media Systems Development Center,Matsushita Electric Industrial Co.,Ltd. |
| Date | 2003/2/21 |
| Paper # | CPM2002-169 |
| Volume (vol) | vol.102 |
| Number (no) | 664 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |