| Presentation | 2002/11/6 Composition Control of CuInS_2 Thin Films Prepared by the Reactive Sputtering Method Using CS_2 Gas Shinobu KERA, Satoshi KOBAYASHI, Nozomu TUBOI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | CuInS_2 thin films were prepared by the reactive sputtering method using CS_2 gas under the various the target area ratio and CS_2 gas partial pressure were investigated. It was found that the [Cu]/[In] composition ratio proportionaly increased, and the [S]/([Cu]+[In]) composition ratio slightly decreased with increasing Cu/In target area ratio. The strong CuInS_2(112) X-ray intensity was found in films deposited under high CS_2 gas partial pressure of 0.20×10^-3Torr and 0.25×10^-3Torr. The transmission rised at shorter wavelength than the bulk absorption edge of 810nm. All films were p-type and their resistivity decresed with increasing Cu/In target area ratio. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | reactive sputtering / CuInS_2 / thin films |
| Paper # | CPM2002-113 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2002/11/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Composition Control of CuInS_2 Thin Films Prepared by the Reactive Sputtering Method Using CS_2 Gas |
| Sub Title (in English) | |
| Keyword(1) | reactive sputtering |
| Keyword(2) | CuInS_2 |
| Keyword(3) | thin films |
| 1st Author's Name | Shinobu KERA |
| 1st Author's Affiliation | Graduate School of Science and Technology, Nigata University() |
| 2nd Author's Name | Satoshi KOBAYASHI |
| 2nd Author's Affiliation | Faculty of Engineering, Nigata University |
| 3rd Author's Name | Nozomu TUBOI |
| 3rd Author's Affiliation | Faculty of Engineering, Nigata University |
| Date | 2002/11/6 |
| Paper # | CPM2002-113 |
| Volume (vol) | vol.102 |
| Number (no) | 434 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |