| Presentation | 2002/10/4 Application of an electrochemical method with aqueous KOH solutions for fabrication of 6H-SiC patterned structures Masashi KATO, Masaya ICHIMURA, Eisuke ARAI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Commercially available n-type 6H-SiC bulk crystals were etched by an electrochemical method using aqueous KOH solutions. Etching conditions, such as KOH concentration, temperature and current density were varied. Etched surface morphologies and etching rates depended on the etching conditions. In order to fabricate patterned structures on 6H-SiC surfaces, we used Ni metal as a mask material using an etching condition which is able to get the flattest etched surface with a reasonable etching rate. As a result, although there are some problems, the patterned structure was obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | 6H-SiC / electrochemical method / KOH / etching / patterned structure |
| Paper # | CPM2002-111 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2002/10/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Application of an electrochemical method with aqueous KOH solutions for fabrication of 6H-SiC patterned structures |
| Sub Title (in English) | |
| Keyword(1) | 6H-SiC |
| Keyword(2) | electrochemical method |
| Keyword(3) | KOH |
| Keyword(4) | etching |
| Keyword(5) | patterned structure |
| 1st Author's Name | Masashi KATO |
| 1st Author's Affiliation | Dept. of Electrical and Computer Eng., Nagoya Inst. of Tech() |
| 2nd Author's Name | Masaya ICHIMURA |
| 2nd Author's Affiliation | Dept. of Electrical and Computer Eng., Nagoya Inst. of Tech |
| 3rd Author's Name | Eisuke ARAI |
| 3rd Author's Affiliation | Dept. of Electrical and Computer Eng., Nagoya Inst. of Tech |
| Date | 2002/10/4 |
| Paper # | CPM2002-111 |
| Volume (vol) | vol.102 |
| Number (no) | 366 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |