| Presentation | 2002/10/4 Growth of HEMT Structure with InAlP Carrier Supply Layer Haruki YOKOYAMA, Hiroki SUGIYAMA, Yasuhiro ODA, Takashi KOBAYASHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | InAlAs is used as a carrier supply layer in the conventional HEMT structure. When the thermal stability of HEMT was examined by the annealing experiments,the mobility decreased at the annealing temperature of more than 600℃. From SIMS analysis, it was found that the thermal diffusion of delta-doped Si resulted in this decrease. We proposed In(Al)P for suppression of Si diffusion and clarified that its diffusion constant was two order of magnitude lower than that of InAlAs. The suppression effect of Si diffusion on HEMT with an In(Al)P carrier supply layer was confirmed by the increase of mobility and improvement of annealing characteristics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InP / HEMT / InAlP / diffusion / mobility |
| Paper # | CPM2002-107 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2002/10/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of HEMT Structure with InAlP Carrier Supply Layer |
| Sub Title (in English) | |
| Keyword(1) | InP |
| Keyword(2) | HEMT |
| Keyword(3) | InAlP |
| Keyword(4) | diffusion |
| Keyword(5) | mobility |
| 1st Author's Name | Haruki YOKOYAMA |
| 1st Author's Affiliation | NTT Photonics Laboratories() |
| 2nd Author's Name | Hiroki SUGIYAMA |
| 2nd Author's Affiliation | NTT Photonics Laboratories |
| 3rd Author's Name | Yasuhiro ODA |
| 3rd Author's Affiliation | NTT Photonics Laboratories |
| 4th Author's Name | Takashi KOBAYASHI |
| 4th Author's Affiliation | NTT Photonics Laboratories |
| Date | 2002/10/4 |
| Paper # | CPM2002-107 |
| Volume (vol) | vol.102 |
| Number (no) | 366 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |