| Presentation | 2003/12/11 Recent Results of Surface Acoustic Wave Motors : High Speed, Nano Stepping and Energy Circulation Drive Minoru Kuribayashi KUROSAWA, Hidekazu NANZAWA, Purevdagva NAYANBUU, Yuta NAKAMURA, Takashi SHIGEMATSU, Katsuhiko ASAI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Mechanical structure of an experimental setup is very important to obtain stable operation for a surface acoustic wave motor, due to tiny vibration amplitude of nanometer order. An improved setup which had low profile slider block was effective to examine the performance of new ceramics coated devices. We obtained l.5 m/s and 11 N for no-load speed and maximum thrust. Resolution of a motor was also tested. The best one was less than 1 nm. To Improve efficiency, the energy circulation driving devices were fabricated and tested. The most efficient device achieved 50 W circulation power against 10 W driving power. The motor operation was also measured. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Micro actuator / Linear motor / Ultrasonic motor / Surface acoustic wave / MEMS / Nano technology |
| Paper # | US2003-91 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2003/12/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Recent Results of Surface Acoustic Wave Motors : High Speed, Nano Stepping and Energy Circulation Drive |
| Sub Title (in English) | |
| Keyword(1) | Micro actuator |
| Keyword(2) | Linear motor |
| Keyword(3) | Ultrasonic motor |
| Keyword(4) | Surface acoustic wave |
| Keyword(5) | MEMS |
| Keyword(6) | Nano technology |
| 1st Author's Name | Minoru Kuribayashi KUROSAWA |
| 1st Author's Affiliation | Dept. of Advanced Applied Electronics, Tokyo Institute of Technology() |
| 2nd Author's Name | Hidekazu NANZAWA |
| 2nd Author's Affiliation | Dept. of Advanced Applied Electronics, Tokyo Institute of Technology |
| 3rd Author's Name | Purevdagva NAYANBUU |
| 3rd Author's Affiliation | Dept. of Advanced Applied Electronics, Tokyo Institute of Technology |
| 4th Author's Name | Yuta NAKAMURA |
| 4th Author's Affiliation | Dept. of Advanced Applied Electronics, Tokyo Institute of Technology |
| 5th Author's Name | Takashi SHIGEMATSU |
| 5th Author's Affiliation | Dept. of Advanced Applied Electronics, Tokyo Institute of Technology |
| 6th Author's Name | Katsuhiko ASAI |
| 6th Author's Affiliation | Advanced Tech. Res. Lab., Matsushita Electric Industrial Co., Ltd. |
| Date | 2003/12/11 |
| Paper # | US2003-91 |
| Volume (vol) | vol.103 |
| Number (no) | 500 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |