Presentation 2002/11/22
Comparison between Optical Measurement and Numerical Analysis of Diffraction Effect of Surface Wave on SAW Devices
Takao CHIBA, Motoki ABE,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The optical measurement results of the diffraction effect of the surface wave from uniform IDT on 128° Y-X LiNbO3 substrate and from chirp IDT in the dispersive delay line on Y-Z LiNbO3 substrate are compared with the simulation results of using the Fresnel integration by the parabolic anisotropy approximation. As the results, it has been shown that the simulation results are corresponding to the experiment results well when the anisotropic parameter calculated from the material constants of G. Kovacs et al or J. Kushibiki et al is used, and also explain well the asymmetrical diffraction effect of the surface wave excited from chirp IDT toward right and left direction in the dispersion delay line.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SAW Device / Optical Probing / Diffraction Effect
Paper # SAW2002-72
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Conference Information
Committee US
Conference Date 2002/11/22(1days)
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Paper Information
Registration To Ultrasonics (US)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Comparison between Optical Measurement and Numerical Analysis of Diffraction Effect of Surface Wave on SAW Devices
Sub Title (in English)
Keyword(1) SAW Device
Keyword(2) Optical Probing
Keyword(3) Diffraction Effect
1st Author's Name Takao CHIBA
1st Author's Affiliation Faculty of Physical Sciences and Engineering, Meisei University()
2nd Author's Name Motoki ABE
2nd Author's Affiliation Faculty of Physical Sciences and Engineering, Meisei University
Date 2002/11/22
Paper # SAW2002-72
Volume (vol) vol.102
Number (no) 486
Page pp.pp.-
#Pages 5
Date of Issue