| Presentation | 2002/11/22 Study of High Sensitive Chemical Sensor Based on Shear Horizontal Acoustic Waves in Isotropic Film/Piezoelectric Substrate Structures Jun KONDOH, Showko SHIOKAWA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Realization of a high sensitive immunosensor based on the mass loading effect is important application of acoustic wave based sensors. As the sensitivity of the mass loading effect is directly proportional to the operating frequency of the acoustic wave sensors, the high frequency device can work as the high sensitive sensor. The noise, however, is also proportional to it. Therefore, it is necessary to develop high sensitive mass sensor at low operating frequency. In this paper, we report the numerical calculation results of a shear horizontal mode acoustic wave in an isotropic film/piezoelectric substrate structure for the high sensitive mass sensor. The results show that the mass sensitivity is a function of layer thickness on a piezoelectric substrate. In other word, the high sensitive mass sensor is realized with optimum thickness of the layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | shear horizontal acoustic wave / layered structure / mass loading effect / mass sensor / immunosensor |
| Paper # | SAW2002-70 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2002/11/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of High Sensitive Chemical Sensor Based on Shear Horizontal Acoustic Waves in Isotropic Film/Piezoelectric Substrate Structures |
| Sub Title (in English) | |
| Keyword(1) | shear horizontal acoustic wave |
| Keyword(2) | layered structure |
| Keyword(3) | mass loading effect |
| Keyword(4) | mass sensor |
| Keyword(5) | immunosensor |
| 1st Author's Name | Jun KONDOH |
| 1st Author's Affiliation | Faculty of Engineering, Shizuoka University() |
| 2nd Author's Name | Showko SHIOKAWA |
| 2nd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| Date | 2002/11/22 |
| Paper # | SAW2002-70 |
| Volume (vol) | vol.102 |
| Number (no) | 486 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |