Presentation 2003/10/10
Fabrication and evaluation of high temperature superconducting thin films foi filter applications
Michito ADACHI, Masanobu SHIRAKAWA, Motonori TAKEZAWA, Hirofumi AITA, Atsushi SAITO, Masashi MUKAIDA, Shigetoshi OHSHIMA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) YBa_2Cu_3O_y(YBCO)/CeO_2 thin films were deposited on r-, c-, and a-plane sapphire substrates(r-, c-, a-AI_2O_3). The YBCO films on the a-AI_2O_3 showed c-axis orientation and a critical temperature T_c of 88.6 K which is nearly the same as that on the r-AI_2O_3. Etching characteristics of the YBCO thin films by an ECR etching system were investigated. The etching rate on the area of 20 mm in diameter was approximately uniform, and its difference of the rate was below 4.3 %. Duplexer was designed using 3- and 5-pole Chebychev-type band pass filter (BPF). Sharper skirt characteristic and better duplexer distribute-function could be got as increased the pole of Chebychev-type BPF, through simulations.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) a-Ai_2O_3 / c-AI_2O_3 / ECR etching / superconducting duplexer / Chebychev-type filter
Paper # SCE2003-23
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Conference Information
Committee SCE
Conference Date 2003/10/10(1days)
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Paper Information
Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and evaluation of high temperature superconducting thin films foi filter applications
Sub Title (in English)
Keyword(1) a-Ai_2O_3
Keyword(2) c-AI_2O_3
Keyword(3) ECR etching
Keyword(4) superconducting duplexer
Keyword(5) Chebychev-type filter
1st Author's Name Michito ADACHI
1st Author's Affiliation Faculty of Engineering, Yamagata University()
2nd Author's Name Masanobu SHIRAKAWA
2nd Author's Affiliation Faculty of Engineering, Yamagata University
3rd Author's Name Motonori TAKEZAWA
3rd Author's Affiliation Faculty of Engineering, Yamagata University
4th Author's Name Hirofumi AITA
4th Author's Affiliation Faculty of Engineering, Yamagata University
5th Author's Name Atsushi SAITO
5th Author's Affiliation Faculty of Engineering, Yamagata University
6th Author's Name Masashi MUKAIDA
6th Author's Affiliation Faculty of Engineering, Yamagata University
7th Author's Name Shigetoshi OHSHIMA
7th Author's Affiliation Faculty of Engineering, Yamagata University
Date 2003/10/10
Paper # SCE2003-23
Volume (vol) vol.103
Number (no) 367
Page pp.pp.-
#Pages 7
Date of Issue