Presentation 2003/7/11
preparation and Evaluation YBCO thin film by spin-coat process
Tomoyuki Matsumoto, Norio Murayama, Atsushi Saito, Masashi Mukaida, Shigetoshi Ohshima,
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Abstract(in English) YBa_2Cu_3O_y (YBCO) thin film prepared by flurine-free spin-coated process, metal acetylacetonate solution, were evaluation. Thin film was prepared on LSAT [(La_xSr_<1-x>)(Al_xTa_,<1-x>)O_3] substrate and r-face-sapphire substrate was deposited by CeO_2 as buffer layer. YBCO thin film chaged a-axis to c-axis boundary initial heat treatment at 800℃. C-axis oriented film was subjected to heat treatment at 830℃ in O_2 after it heated in air to 400℃. LSAT substrate was oriented c-axis, too. Solutions were prepared YBCO thin film, didn't include fluorine.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) spin-coat-process / acetylacetonate / r-face-Al2O3 / LSAT
Paper # SCE2003-17
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Committee SCE
Conference Date 2003/7/11(1days)
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Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) preparation and Evaluation YBCO thin film by spin-coat process
Sub Title (in English)
Keyword(1) spin-coat-process
Keyword(2) acetylacetonate
Keyword(3) r-face-Al2O3
Keyword(4) LSAT
1st Author's Name Tomoyuki Matsumoto
1st Author's Affiliation Faculty of Engineering, Yamagata University()
2nd Author's Name Norio Murayama
2nd Author's Affiliation Faculty of Engineering, Yamagata University
3rd Author's Name Atsushi Saito
3rd Author's Affiliation Faculty of Engineering, Yamagata University
4th Author's Name Masashi Mukaida
4th Author's Affiliation Faculty of Engineering, Yamagata University
5th Author's Name Shigetoshi Ohshima
5th Author's Affiliation Faculty of Engineering, Yamagata University
Date 2003/7/11
Paper # SCE2003-17
Volume (vol) vol.103
Number (no) 211
Page pp.pp.-
#Pages 4
Date of Issue