| Presentation | 2003/7/11 Modification of superconductivity for YBCO films by ion bombardment process Mizushi MATSUDA, Atsushi TAKAHASHI, Shinya KURIKI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed techniques to control superconductivity of YBCO films in the depth directions. In this method, a nonsuperconducting layer was made at a surface of YBCO by the ion irradiatio with a low acceleration voltage of focused ion beam (FIB). A typical dose density of 20-40 kV Si^<++> FIB was 10^<13>-10^<14> ions/cm^2. Thickness of a damaged layer by a ion irradiation could be evaluated by ion bombardment enhanced etching process using Br solution diluted by ethanol because such a region formed by the ion bombardment is selectively dissolved and removed away almost completely in the etchant. Depth of the damaged layer depends on the aceleration voltage of FIB. We also compared the critical current values of virgin YBCO bridges with those of line-dosed bridges to evaluate the thickness of nonsuperconducting layer formed. It was found no degradation of superconducting properties was caused at the films left under the penetration depth of irradiations. The irradiation through a buffer layer of Au upon an YBCO film was found to be effective to decrease the thickness of nonsuperconductive YBCO layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Focused in beam / YBCO films / ion irradiation / damaged layer / Au buffer / control of superconductivity |
| Paper # | SCE2003-16 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2003/7/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Modification of superconductivity for YBCO films by ion bombardment process |
| Sub Title (in English) | |
| Keyword(1) | Focused in beam |
| Keyword(2) | YBCO films |
| Keyword(3) | ion irradiation |
| Keyword(4) | damaged layer |
| Keyword(5) | Au buffer |
| Keyword(6) | control of superconductivity |
| 1st Author's Name | Mizushi MATSUDA |
| 1st Author's Affiliation | Muroran Institute of Technology() |
| 2nd Author's Name | Atsushi TAKAHASHI |
| 2nd Author's Affiliation | Research Institute for Electronic Science, Hokkaido Univ. |
| 3rd Author's Name | Shinya KURIKI |
| 3rd Author's Affiliation | Research Institute for Electronic Science, Hokkaido Univ. |
| Date | 2003/7/11 |
| Paper # | SCE2003-16 |
| Volume (vol) | vol.103 |
| Number (no) | 211 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |