| Presentation | 2003/1/22 Fabrication of Josephson Tunnel Junctions Using Photosensitive Polyimide Insulator Katsuya KIKUCHI, Shigemasa SEGAWA, Eun-Sil JUNG, Tomokazu OKAWA, Daisuke UMETSU, Hiroshi NAKAGAWA, Kazuhiko TOKORO, Hiroshi ITATANI, Masahiro AOYAGI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed a new fabrication process for the Josephson tunnel junction using a photosensitive polyimide. Photosensitive polyimide is composed of block copolymerized polyimide and sensitizer. By utilizing the photosensitive polyimide, fabrication process of the Josephson tunnel junction can be simplified. We fabricated Nb/Al-AlO_x/Nb Josephson tunnel junctions using this new process. As a result of observing by SEM, steep steps of the junction edges were covered smoothly by the polyimide film. The junctions show excellent current-voltage (I-V) characteristics with V_m values more than 80 mV. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Photosensitive Polyimide / Josephson Tunnel Junctions / Block Copolymerized Polyimide with Solvent Solubility |
| Paper # | SCE2002-34 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2003/1/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Josephson Tunnel Junctions Using Photosensitive Polyimide Insulator |
| Sub Title (in English) | |
| Keyword(1) | Photosensitive Polyimide |
| Keyword(2) | Josephson Tunnel Junctions |
| Keyword(3) | Block Copolymerized Polyimide with Solvent Solubility |
| 1st Author's Name | Katsuya KIKUCHI |
| 1st Author's Affiliation | NeRI,AIST() |
| 2nd Author's Name | Shigemasa SEGAWA |
| 2nd Author's Affiliation | PI R&D Co.,Ltd. |
| 3rd Author's Name | Eun-Sil JUNG |
| 3rd Author's Affiliation | NeRI,AIST |
| 4th Author's Name | Tomokazu OKAWA |
| 4th Author's Affiliation | Faculty of Engineering,Saitama Univ. |
| 5th Author's Name | Daisuke UMETSU |
| 5th Author's Affiliation | Faculty of Engineering,Chiba Inst.Tech. |
| 6th Author's Name | Hiroshi NAKAGAWA |
| 6th Author's Affiliation | NeRI,AIST |
| 7th Author's Name | Kazuhiko TOKORO |
| 7th Author's Affiliation | NeRI,AIST |
| 8th Author's Name | Hiroshi ITATANI |
| 8th Author's Affiliation | PI R&D Co.,Ltd. |
| 9th Author's Name | Masahiro AOYAGI |
| 9th Author's Affiliation | NeRI,AIST |
| Date | 2003/1/22 |
| Paper # | SCE2002-34 |
| Volume (vol) | vol.102 |
| Number (no) | 612 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |