| Presentation | 2004/1/23 Temperature and Thickness Sensor using Optical Fiber-type Low-coherence Interferometer Kanta KAWASAKI, Keigo TAKEDA, Masafumi ITO, Chishio KOSHIMIZU, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The temperature control of substrates will be significant to realize much finer and deeper pattern in an ultra-fine processing technology such as a plasma process. However a promising sensor system has not been developed. So we have developed a temperature sensor for measuring the temperature of each layer of multi-layered substrates, such as silicon on insulator (SOI) used in micro-machining processes, using a low-coherence interferometer and a Michelson interferometer. We have evaluated the system using three layered substrates. From these results, we have confirmed the usefulness of the system. But, circumstantially, the system cannot measure the temperatures of substrates with thin film layers which have the optical pass length less than coherent length of a low-coherent light source. To overcome this problem, we have proposed a novel sensor for measuring the thickness of the thin film layer as well as the temperature of the substrate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | plasma etching / low-coherence interferometer / Michelson interferometer / optical fiber sensor |
| Paper # | PN2003-81,OFT2003-104,OPE2003-261,LQE2003-198 |
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| Conference Information | |
| Committee | OFT |
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| Conference Date | 2004/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optical Fiber Technology (OFT) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Temperature and Thickness Sensor using Optical Fiber-type Low-coherence Interferometer |
| Sub Title (in English) | |
| Keyword(1) | plasma etching |
| Keyword(2) | low-coherence interferometer |
| Keyword(3) | Michelson interferometer |
| Keyword(4) | optical fiber sensor |
| 1st Author's Name | Kanta KAWASAKI |
| 1st Author's Affiliation | Graduate School of Systems Engineering, Wakayama University() |
| 2nd Author's Name | Keigo TAKEDA |
| 2nd Author's Affiliation | Graduate School of Systems Engineering, Wakayama University |
| 3rd Author's Name | Masafumi ITO |
| 3rd Author's Affiliation | Graduate School of Systems Engineering, Wakayama University |
| 4th Author's Name | Chishio KOSHIMIZU |
| 4th Author's Affiliation | ESD Development Division, Tokyo Electron AT Ltd. |
| Date | 2004/1/23 |
| Paper # | PN2003-81,OFT2003-104,OPE2003-261,LQE2003-198 |
| Volume (vol) | vol.103 |
| Number (no) | 615 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |