Presentation 2004/1/21
The Novel Design of a Polarization Independent Multi-layer DOE Simulated by RCWA Method, and its Fabrication
Manabu SHIOZAKI, Masakazu SHIGEHARA,
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Abstract(in English) We studied the polarization independent design of first-order transmission diffractive optical elements (DOEs) using optical simulation based on RCWA and computational optimization of SA method. To realize high diffraction efficiency and low polarization dependence, reduction of reflection at upper and bottom surfaces of a grating is important. So, by using the 2-layer structure of Ta_2O_5 and SiO_2, good design which satisfy the optical performance at broad wavelength band was obtained. Furthermore, in order to verify the effect of multi-layer structure, we fabricated the 2-layer DOE. Good optical performance considering high angle dispersion, and good agreement between experiment and simulation were obtained.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) RCWA / Multi-layer / Diffraction Grating / First-order / Polarization Independent
Paper # PN2003-60,OFT2003-82,OPE2003-239,LQE2003-176
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Committee OFT
Conference Date 2004/1/21(1days)
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Registration To Optical Fiber Technology (OFT)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The Novel Design of a Polarization Independent Multi-layer DOE Simulated by RCWA Method, and its Fabrication
Sub Title (in English)
Keyword(1) RCWA
Keyword(2) Multi-layer
Keyword(3) Diffraction Grating
Keyword(4) First-order
Keyword(5) Polarization Independent
1st Author's Name Manabu SHIOZAKI
1st Author's Affiliation Analysis Technology Research Center, Sumitomo Electric Industries, Ltd.()
2nd Author's Name Masakazu SHIGEHARA
2nd Author's Affiliation Optical Communications R&D Laboratory, Sumitomo Electric Industries, Ltd.
Date 2004/1/21
Paper # PN2003-60,OFT2003-82,OPE2003-239,LQE2003-176
Volume (vol) vol.103
Number (no) 613
Page pp.pp.-
#Pages 4
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