| Presentation | 2002/11/22 Reliabilities of a MEMS-VOA "MEMSHADE^TM" Makoto KATAYAMA, Takahiro SUNAGA, Tomohiko KANIE, Hiroshi SUGANUMA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a novel MEMS VOA array integrated with Planar Lightwave Circuit(PLC) for application in Wavelength Division Multiplexed(WDM) transmission systems. The VOA array consists of two chip connected together by flip chip bonding. One is the MEMS device which has silicon actuators with micro-mirrors, and the other is a PLC which has a waveguide array. In order to achieve highly dense integration, the MEMS actuator has a long beam cantilever arranged with a 500 μm period. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical Communication / VOA / MEMS / Electro Static Actuator / PLC / Micromirror |
| Paper # | OFT2002-68 |
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| Conference Information | |
| Committee | OFT |
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| Conference Date | 2002/11/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Optical Fiber Technology (OFT) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Reliabilities of a MEMS-VOA "MEMSHADE^TM" |
| Sub Title (in English) | |
| Keyword(1) | Optical Communication |
| Keyword(2) | VOA |
| Keyword(3) | MEMS |
| Keyword(4) | Electro Static Actuator |
| Keyword(5) | PLC |
| Keyword(6) | Micromirror |
| 1st Author's Name | Makoto KATAYAMA |
| 1st Author's Affiliation | Sumitomo Electric Industries, Ltd.() |
| 2nd Author's Name | Takahiro SUNAGA |
| 2nd Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 3rd Author's Name | Tomohiko KANIE |
| 3rd Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 4th Author's Name | Hiroshi SUGANUMA |
| 4th Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| Date | 2002/11/22 |
| Paper # | OFT2002-68 |
| Volume (vol) | vol.102 |
| Number (no) | 485 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |