| Presentation | 2019-01-17 Surface Improvement Investigation of Sol-Gel SiO2 Cladding for Waveguide Device Passivation Satoshi Ogawa, Ahmad Syahrin Idris, Yu Han, Haisong Jiang, Kiichi Hamamoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For exploiting sol-gel SiO2 for waveguide device passivation, plasma-ashing, in addition to 700 ℃ annealing, is proposed to improve surface condition of sol-gel SiO2. Regular wet etching of SiO2 layer on Si with ratio of 1,800 nm/min and sufficient electrical insulation (>1011 Ω/cm) toward proper current induced refractive index change have been successfully confirmed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon photonics / SiO2 / Sol-Gel method / Passivation / Optical waveguides |
| Paper # | PN2018-53,EMT2018-87,OPE2018-162,LQE2018-172,EST2018-100,MWP2018-71 |
| Date of Issue | 2019-01-10 (PN, EMT, OPE, LQE, EST, MWP) |
| Conference Information | |
| Committee | PN / EMT / OPE / EST / MWP / LQE / IEE-EMT |
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| Conference Date | 2019/1/17(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Osaka University Nakanoshima Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroshi Hasegawa(Nagoya Univ.) / Akira Hirose(Univ. of Tokyo) / Kouki Sato(Furukawa Electric Industries) / Akimasa Hirata(Nagoya Inst. of Tech.) / Tetsuya Kawanishi(Waseda Univ.) / Kiichi Hamamoto(Kyusyu Univ.) / Keiji Goto(National Defense Academy) |
| Vice Chair | Haruki Ogoshi(Furukawa Electric) / Takehiro Tsuritani(KDDI Research) / Hideaki Furukawa(NICT) / Koichi Hirayama(Kitami Inst. of Tech.) / Hiroshi Takahashi(Sophia Univ.) / Shinichiro Ohnuki(Nihon Univ.) / Masayuki Kimishima(Advantest) / Jun Shibayama(Hosei Univ.) / Naoto Yoshimoto(Chitose Inst. of Science and Tech.) / Hiroshi Aruga(Mitsubishi Electric) |
| Secretary | Haruki Ogoshi(NICT) / Takehiro Tsuritani(Univ. of Fukui) / Hideaki Furukawa(NTT) / Koichi Hirayama(Tokyo Metro. Coll. of Tech) / Hiroshi Takahashi(Fukuoka Inst.of Tech.) / Shinichiro Ohnuki(Univ. of Tokyo) / Masayuki Kimishima(NICT) / Jun Shibayama(CIST) / Naoto Yoshimoto(National Inst. of Tech.,Sendai College) / Hiroshi Aruga(NICT) / (Chiba Inst. of Tech.) |
| Assistant | Keijiro Suzuki(AIST) / Junichiro Sugisaka(Kitami Inst. of Tech.) / Yuya Shoji(Tokyo Inst. of Tech.) / Kazunori Seno(NTT) / Takahiro Ito(Nagoya Inst. of Tech.) / Kazuhiro Fujita(Fujitsu) / Kensuke Ikeda(CRIEPI) / Kosuke Nishimura(KDDI Research) / Masaya Nagai(Osaka Univ.) / Yoshihiro Naka(Kyushu Univ. of Health and Welfare) |
| Paper Information | |
| Registration To | Technical Committee on Photonic Network / Technical Committee on Electromagnetic Theory / Technical Committee on OptoElectronics / Technical Committee on Electronics Simulation Technology / Technical Committee on Microwave and Millimeter-wave Photonics / Technical Committee on Lasers and Quantum Electronics / Technical Meeting on Electromagnetic Theory |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Surface Improvement Investigation of Sol-Gel SiO2 Cladding for Waveguide Device Passivation |
| Sub Title (in English) | |
| Keyword(1) | Silicon photonics |
| Keyword(2) | SiO2 |
| Keyword(3) | Sol-Gel method |
| Keyword(4) | Passivation |
| Keyword(5) | Optical waveguides |
| 1st Author's Name | Satoshi Ogawa |
| 1st Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 2nd Author's Name | Ahmad Syahrin Idris |
| 2nd Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 3rd Author's Name | Yu Han |
| 3rd Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 4th Author's Name | Haisong Jiang |
| 4th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 5th Author's Name | Kiichi Hamamoto |
| 5th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| Date | 2019-01-17 |
| Paper # | PN2018-53,EMT2018-87,OPE2018-162,LQE2018-172,EST2018-100,MWP2018-71 |
| Volume (vol) | vol.118 |
| Number (no) | PN-396,EMT-397,OPE-398,LQE-399,EST-400,MWP-401 |
| Page | pp.pp.127-130(PN), pp.127-130(EMT), pp.127-130(OPE), pp.127-130(LQE), pp.127-130(EST), pp.127-130(MWP), |
| #Pages | 4 |
| Date of Issue | 2019-01-10 (PN, EMT, OPE, LQE, EST, MWP) |