Presentation | 2018-12-06 High optical coupling efficiency by double taper-type coupler structure towards III-V/Si hybrid photonic integration Takehiko Kikuchi, Junichi Suzuki, Fumihito Tachibana, Naoko Inoue, Hideki Yagi, Moataz Eissa, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The hybrid integration utilizing III-V based active devices with Si-Photonics is very attractive to realize new-generation photonic integrated circuits (PICs) with a small-footprint, high-speed response, and low power dissipation. GaInAsP/ Silicon-On-Insulator (SOI) hybrid photonic integrations have been realized using N2 plasma activated bonding (PAB) processes. In addition, high optical coupling efficiency between the InP-based active section and Si-waveguides is a key issue for the realization of high-performance photonic devices. High optical coupling efficiency between them of 86% was realized by using the i-line stepper lithography process. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | III-V/Si hybrid integration / Double taper-type coupler structure / Plasma activated bonding / InP / Si-Photonics |
Paper # | OPE2018-129,LQE2018-139,SIPH2018-45 |
Date of Issue | 2018-11-29 (OPE, LQE) |
Conference Information | |
Committee | LQE / OPE |
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Conference Date | 2018/12/6(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Keio University |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Photonic Device Workshop |
Chair | Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries) |
Vice Chair | Hiroshi Aruga(Mitsubishi Electric) / Hiroshi Takahashi(Sophia Univ.) |
Secretary | Hiroshi Aruga(SEI) / Hiroshi Takahashi(Furukawa Electric Industries) |
Assistant | Masaya Nagai(Osaka Univ.) / Yuya Shoji(Tokyo Inst. of Tech.) / Kazunori Seno(NTT) |
Paper Information | |
Registration To | Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics |
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Language | ENG-JTITLE |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High optical coupling efficiency by double taper-type coupler structure towards III-V/Si hybrid photonic integration |
Sub Title (in English) | |
Keyword(1) | III-V/Si hybrid integration |
Keyword(2) | Double taper-type coupler structure |
Keyword(3) | Plasma activated bonding |
Keyword(4) | InP |
Keyword(5) | Si-Photonics |
1st Author's Name | Takehiko Kikuchi |
1st Author's Affiliation | Sumitomo Electric Industries, Ltd./Tokyo Institute of Technology(SEI/Tokyo Tech.) |
2nd Author's Name | Junichi Suzuki |
2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
3rd Author's Name | Fumihito Tachibana |
3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
4th Author's Name | Naoko Inoue |
4th Author's Affiliation | Sumitomo Electric Industries, Ltd.(SEI) |
5th Author's Name | Hideki Yagi |
5th Author's Affiliation | Sumitomo Electric Industries, Ltd.(SEI) |
6th Author's Name | Moataz Eissa |
6th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
7th Author's Name | Takuya Mitarai |
7th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
8th Author's Name | Tomohiro Amemiya |
8th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
9th Author's Name | Nobuhiko Nishiyama |
9th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
10th Author's Name | Shigehisa Arai |
10th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
Date | 2018-12-06 |
Paper # | OPE2018-129,LQE2018-139,SIPH2018-45 |
Volume (vol) | vol.118 |
Number (no) | OPE-348,LQE-349,SIPH- |
Page | pp.pp.161-164(OPE), pp.161-164(LQE), pp.161-164(SIPH), |
#Pages | 4 |
Date of Issue | 2018-11-29 (OPE, LQE) |