Presentation 2018-12-06
High optical coupling efficiency by double taper-type coupler structure towards III-V/Si hybrid photonic integration
Takehiko Kikuchi, Junichi Suzuki, Fumihito Tachibana, Naoko Inoue, Hideki Yagi, Moataz Eissa, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The hybrid integration utilizing III-V based active devices with Si-Photonics is very attractive to realize new-generation photonic integrated circuits (PICs) with a small-footprint, high-speed response, and low power dissipation. GaInAsP/ Silicon-On-Insulator (SOI) hybrid photonic integrations have been realized using N2 plasma activated bonding (PAB) processes. In addition, high optical coupling efficiency between the InP-based active section and Si-waveguides is a key issue for the realization of high-performance photonic devices. High optical coupling efficiency between them of 86% was realized by using the i-line stepper lithography process.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) III-V/Si hybrid integration / Double taper-type coupler structure / Plasma activated bonding / InP / Si-Photonics
Paper # OPE2018-129,LQE2018-139,SIPH2018-45
Date of Issue 2018-11-29 (OPE, LQE)

Conference Information
Committee LQE / OPE
Conference Date 2018/12/6(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Keio University
Topics (in Japanese) (See Japanese page)
Topics (in English) Photonic Device Workshop
Chair Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries)
Vice Chair Hiroshi Aruga(Mitsubishi Electric) / Hiroshi Takahashi(Sophia Univ.)
Secretary Hiroshi Aruga(SEI) / Hiroshi Takahashi(Furukawa Electric Industries)
Assistant Masaya Nagai(Osaka Univ.) / Yuya Shoji(Tokyo Inst. of Tech.) / Kazunori Seno(NTT)

Paper Information
Registration To Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics
Language ENG-JTITLE
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High optical coupling efficiency by double taper-type coupler structure towards III-V/Si hybrid photonic integration
Sub Title (in English)
Keyword(1) III-V/Si hybrid integration
Keyword(2) Double taper-type coupler structure
Keyword(3) Plasma activated bonding
Keyword(4) InP
Keyword(5) Si-Photonics
1st Author's Name Takehiko Kikuchi
1st Author's Affiliation Sumitomo Electric Industries, Ltd./Tokyo Institute of Technology(SEI/Tokyo Tech.)
2nd Author's Name Junichi Suzuki
2nd Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
3rd Author's Name Fumihito Tachibana
3rd Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
4th Author's Name Naoko Inoue
4th Author's Affiliation Sumitomo Electric Industries, Ltd.(SEI)
5th Author's Name Hideki Yagi
5th Author's Affiliation Sumitomo Electric Industries, Ltd.(SEI)
6th Author's Name Moataz Eissa
6th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
7th Author's Name Takuya Mitarai
7th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
8th Author's Name Tomohiro Amemiya
8th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
9th Author's Name Nobuhiko Nishiyama
9th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
10th Author's Name Shigehisa Arai
10th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
Date 2018-12-06
Paper # OPE2018-129,LQE2018-139,SIPH2018-45
Volume (vol) vol.118
Number (no) OPE-348,LQE-349,SIPH-
Page pp.pp.161-164(OPE), pp.161-164(LQE), pp.161-164(SIPH),
#Pages 4
Date of Issue 2018-11-29 (OPE, LQE)