| Presentation | 2018-12-25 Effect of atomic hydrogen annealing on AlOx/GeOx/a-Ge stack structure fabricated in O2 ambient Tomofumi Onuki, Akira Heya, Naoto Matsuo, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | EID2018-6,SDM2018-79 |
| Date of Issue | 2018-12-18 (EID, SDM) |
| Conference Information | |
| Committee | EID / SDM / ITE-IDY |
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| Conference Date | 2018/12/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Yuko Kominami(Shizuoka Univ.) / Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Mutsumi Kimura(Ryukoku Univ.) / Tomokazu Shiga(Univ. of Electro-Comm.) / Rumiko Yamaguchi(Akita Univ.) / Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Mutsumi Kimura(NTT) / Tomokazu Shiga(Tokyo Inst. of Tech.) / Rumiko Yamaguchi(Shizuoka Univ.) / Hiroshige Hirano(TOSHIBA MEMORY) |
| Assistant | Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Huawei) / Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Electronic Information Displays / Technical Committee on Silicon Device and Materials / Technical Group on Information Display |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of atomic hydrogen annealing on AlOx/GeOx/a-Ge stack structure fabricated in O2 ambient |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Tomofumi Onuki |
| 1st Author's Affiliation | University of Hyogo(Univ. Hyogo) |
| 2nd Author's Name | Akira Heya |
| 2nd Author's Affiliation | University of Hyogo(Univ. Hyogo) |
| 3rd Author's Name | Naoto Matsuo |
| 3rd Author's Affiliation | University of Hyogo(Univ. Hyogo) |
| Date | 2018-12-25 |
| Paper # | EID2018-6,SDM2018-79 |
| Volume (vol) | vol.118 |
| Number (no) | EID-379,SDM-380 |
| Page | pp.pp.21-24(EID), pp.21-24(SDM), |
| #Pages | 4 |
| Date of Issue | 2018-12-18 (EID, SDM) |