Presentation | 2018-12-25 Effect of atomic hydrogen annealing on AlOx/GeOx/a-Ge stack structure fabricated in O2 ambient Tomofumi Onuki, Akira Heya, Naoto Matsuo, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | EID2018-6,SDM2018-79 |
Date of Issue | 2018-12-18 (EID, SDM) |
Conference Information | |
Committee | EID / SDM / ITE-IDY |
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Conference Date | 2018/12/25(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | Yuko Kominami(Shizuoka Univ.) / Takahiro Shinada(Tohoku Univ.) |
Vice Chair | Mutsumi Kimura(Ryukoku Univ.) / Tomokazu Shiga(Univ. of Electro-Comm.) / Rumiko Yamaguchi(Akita Univ.) / Hiroshige Hirano(TowerJazz Panasonic) |
Secretary | Mutsumi Kimura(NTT) / Tomokazu Shiga(Tokyo Inst. of Tech.) / Rumiko Yamaguchi(Shizuoka Univ.) / Hiroshige Hirano(TOSHIBA MEMORY) |
Assistant | Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Huawei) / Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
Paper Information | |
Registration To | Technical Committee on Electronic Information Displays / Technical Committee on Silicon Device and Materials / Technical Group on Information Display |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Effect of atomic hydrogen annealing on AlOx/GeOx/a-Ge stack structure fabricated in O2 ambient |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Tomofumi Onuki |
1st Author's Affiliation | University of Hyogo(Univ. Hyogo) |
2nd Author's Name | Akira Heya |
2nd Author's Affiliation | University of Hyogo(Univ. Hyogo) |
3rd Author's Name | Naoto Matsuo |
3rd Author's Affiliation | University of Hyogo(Univ. Hyogo) |
Date | 2018-12-25 |
Paper # | EID2018-6,SDM2018-79 |
Volume (vol) | vol.118 |
Number (no) | EID-379,SDM-380 |
Page | pp.pp.21-24(EID), pp.21-24(SDM), |
#Pages | 4 |
Date of Issue | 2018-12-18 (EID, SDM) |