| Presentation | 2018-12-06 Examination of Chip-on-Wafer Plasma Activated Bonding Technology for III-V on Si hybrid Photonic Integrated Circuits LIU BAI, Takehiko Kikuchi, Takuya Mitarai, Nobuhiko Nishiyama, Hideki Yagi, Tomohiro Amemiya, Shigehisa Arai, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hybrid / Photonic Integrated Circuits / Chip-on-Wafer / Plasma Activated Bonding / photoluminescence / stress |
| Paper # | OPE2018-127,LQE2018-137,SIPH2018-43 |
| Date of Issue | 2018-11-29 (OPE, LQE) |
| Conference Information | |
| Committee | LQE / OPE |
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| Conference Date | 2018/12/6(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Keio University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Photonic Device Workshop |
| Chair | Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries) |
| Vice Chair | Hiroshi Aruga(Mitsubishi Electric) / Hiroshi Takahashi(Sophia Univ.) |
| Secretary | Hiroshi Aruga(SEI) / Hiroshi Takahashi(Furukawa Electric Industries) |
| Assistant | Masaya Nagai(Osaka Univ.) / Yuya Shoji(Tokyo Inst. of Tech.) / Kazunori Seno(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics |
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| Language | ENG-JTITLE |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Examination of Chip-on-Wafer Plasma Activated Bonding Technology for III-V on Si hybrid Photonic Integrated Circuits |
| Sub Title (in English) | |
| Keyword(1) | Hybrid |
| Keyword(2) | Photonic Integrated Circuits |
| Keyword(3) | Chip-on-Wafer |
| Keyword(4) | Plasma Activated Bonding |
| Keyword(5) | photoluminescence |
| Keyword(6) | stress |
| 1st Author's Name | LIU BAI |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Takehiko Kikuchi |
| 2nd Author's Affiliation | Sumitomo Electric Industries, Ltd(SEI) |
| 3rd Author's Name | Takuya Mitarai |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 4th Author's Name | Nobuhiko Nishiyama |
| 4th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 5th Author's Name | Hideki Yagi |
| 5th Author's Affiliation | Sumitomo Electric Industries, Ltd(SEI) |
| 6th Author's Name | Tomohiro Amemiya |
| 6th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 7th Author's Name | Shigehisa Arai |
| 7th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| Date | 2018-12-06 |
| Paper # | OPE2018-127,LQE2018-137,SIPH2018-43 |
| Volume (vol) | vol.118 |
| Number (no) | OPE-348,LQE-349,SIPH- |
| Page | pp.pp.149-153(OPE), pp.149-153(LQE), pp.149-153(SIPH), |
| #Pages | 5 |
| Date of Issue | 2018-11-29 (OPE, LQE) |