| Presentation | 2018-12-06 Radical Assisted Sputtering optical application Yasuhito Tanaka, Shinichiro Saisho, Gabriel Delgado Fuentes, Tomoki Kasumi, Hideo Isshiki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | RAS (Rasical Assisted Suputtering) is applied to optical devices such as silicon photonics, which repeats alternately the metal imperfect compound process and the complete reaction process by radical source. RAS has been used for mass production until now, but in this research we developed RAS for research. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | RAS (Radical Assisted Sputtering) / Silicon photonics |
| Paper # | OPE2018-124,LQE2018-134,SIPH2018-40 |
| Date of Issue | 2018-11-29 (OPE, LQE) |
| Conference Information | |
| Committee | LQE / OPE |
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| Conference Date | 2018/12/6(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Keio University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Photonic Device Workshop |
| Chair | Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries) |
| Vice Chair | Hiroshi Aruga(Mitsubishi Electric) / Hiroshi Takahashi(Sophia Univ.) |
| Secretary | Hiroshi Aruga(SEI) / Hiroshi Takahashi(Furukawa Electric Industries) |
| Assistant | Masaya Nagai(Osaka Univ.) / Yuya Shoji(Tokyo Inst. of Tech.) / Kazunori Seno(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Radical Assisted Sputtering optical application |
| Sub Title (in English) | |
| Keyword(1) | RAS (Radical Assisted Sputtering) |
| Keyword(2) | Silicon photonics |
| 1st Author's Name | Yasuhito Tanaka |
| 1st Author's Affiliation | Shincron Co., Ltd/The University of Electro-Communications(Shincron/UEC) |
| 2nd Author's Name | Shinichiro Saisho |
| 2nd Author's Affiliation | Shincron Co., Ltd(Shincron) |
| 3rd Author's Name | Gabriel Delgado Fuentes |
| 3rd Author's Affiliation | The University of Electro-Communications(UEC) |
| 4th Author's Name | Tomoki Kasumi |
| 4th Author's Affiliation | The University of Electro-Communications(UEC) |
| 5th Author's Name | Hideo Isshiki |
| 5th Author's Affiliation | The University of Electro-Communications(UEC) |
| Date | 2018-12-06 |
| Paper # | OPE2018-124,LQE2018-134,SIPH2018-40 |
| Volume (vol) | vol.118 |
| Number (no) | OPE-348,LQE-349,SIPH- |
| Page | pp.pp.135-138(OPE), pp.135-138(LQE), pp.135-138(SIPH), |
| #Pages | 4 |
| Date of Issue | 2018-11-29 (OPE, LQE) |