| Presentation | 2018-12-06 Deposition of Ce:YIG on Si for Magneto-Optical Devices Michiomi Noguchi, Yuya Shoji, Tetsuya Mizumoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report the deposition of a polycrystalline Ce-monosubstituted Yttrium Iron Garnet (CeY2Fe5O12, Ce:YIG) by a direct deposition method on a Silicon substrate. Expecting improvement of crystallinity, YIG (Y3Fe5O12) is formed as an seedlayer by metal organic decomposition method (MOD method), and Ce:YIG polycrystal is formed thereon by sputtering method, succeeded in forming the Ce:YIG/YIG/Si structure. The Faraday rotation coefficient of the obtained polycrystalline Ce:YIG is -1400 deg/cm, which corresponds to 31% of the single crystal. The thickness of the seedlayer of the obtained structure was 120 nm. It was also found that reduction of the thickness of the seedlayer is effective for improving the characteristics of the nonreciprocal waveguide with the obtained structure. In order to reduce the thickness of the seedlayer, we also tried to improve the MOD process and report it. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical Integrated Circuit / Magneto-optical Material / Magneto-optical Device / Silicon Photonics / Ce:YIG / Metal Organic Decomposition |
| Paper # | OPE2018-123,LQE2018-133,SIPH2018-39 |
| Date of Issue | 2018-11-29 (OPE, LQE) |
| Conference Information | |
| Committee | LQE / OPE |
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| Conference Date | 2018/12/6(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Keio University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Photonic Device Workshop |
| Chair | Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries) |
| Vice Chair | Hiroshi Aruga(Mitsubishi Electric) / Hiroshi Takahashi(Sophia Univ.) |
| Secretary | Hiroshi Aruga(SEI) / Hiroshi Takahashi(Furukawa Electric Industries) |
| Assistant | Masaya Nagai(Osaka Univ.) / Yuya Shoji(Tokyo Inst. of Tech.) / Kazunori Seno(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deposition of Ce:YIG on Si for Magneto-Optical Devices |
| Sub Title (in English) | |
| Keyword(1) | Optical Integrated Circuit |
| Keyword(2) | Magneto-optical Material |
| Keyword(3) | Magneto-optical Device |
| Keyword(4) | Silicon Photonics |
| Keyword(5) | Ce:YIG |
| Keyword(6) | Metal Organic Decomposition |
| 1st Author's Name | Michiomi Noguchi |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Yuya Shoji |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 3rd Author's Name | Tetsuya Mizumoto |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| Date | 2018-12-06 |
| Paper # | OPE2018-123,LQE2018-133,SIPH2018-39 |
| Volume (vol) | vol.118 |
| Number (no) | OPE-348,LQE-349,SIPH- |
| Page | pp.pp.131-134(OPE), pp.131-134(LQE), pp.131-134(SIPH), |
| #Pages | 4 |
| Date of Issue | 2018-11-29 (OPE, LQE) |