| Presentation | 2018-11-02 Deposition of c-axis parallel oriented ZnO film on entire surface of silica glass pipe Yuta Takamura, Shinji Takayanagi, Mami Matsukawa, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | SH type SAW sensor can measure the viscosity, conductivity and permittivity of a liquid because it propagate to liquid / solid interface with the small leakage to liquid. One approach for highly sensitive sensor is multiple roundtrips of acoustic wave. We succeeded in observation of multiple roundtrips of SH type bulk wave using c-axis parallel oriented ZnO film on a part of the silica glass pipe. However, SH type SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the pipe-surface deposition of the c-axis parallel oriented ZnO film by a substrate rotation system for the uniform film growth on the entire pipe surface. As a result, a uniform c-axis parallel oriented ZnO film on the entire surface of the silica glass pipe was obtained by decreasing the sputtering power and the substrate rotation speed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | c-Axis parallel oriented ZnO film / Pipe substrate / Sputtering deposition / SH wave |
| Paper # | US2018-68 |
| Date of Issue | 2018-10-26 (US) |
| Conference Information | |
| Committee | US |
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| Conference Date | 2018/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Shinichi Takeuchi(Toin Univ. of Yokohama) |
| Vice Chair | Minoru Kurosawa(Tokyo Inst. of Tech.) / Jun Kondo(Shizuoka Univ.) |
| Secretary | Minoru Kurosawa(Univ. of Tokyo) / Jun Kondo(Kanagawa Univ.) |
| Assistant | Daisuke Koyama(Doshisha Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deposition of c-axis parallel oriented ZnO film on entire surface of silica glass pipe |
| Sub Title (in English) | |
| Keyword(1) | c-Axis parallel oriented ZnO film |
| Keyword(2) | Pipe substrate |
| Keyword(3) | Sputtering deposition |
| Keyword(4) | SH wave |
| 1st Author's Name | Yuta Takamura |
| 1st Author's Affiliation | Doshisha University(Doshisha Univ.) |
| 2nd Author's Name | Shinji Takayanagi |
| 2nd Author's Affiliation | Nagoya Institute of Technology(Nagoya Inst. Tech.) |
| 3rd Author's Name | Mami Matsukawa |
| 3rd Author's Affiliation | Doshisha University(Doshisha Univ.) |
| 4th Author's Name | Takahiko Yanagitani |
| 4th Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2018-11-02 |
| Paper # | US2018-68 |
| Volume (vol) | vol.118 |
| Number (no) | US-277 |
| Page | pp.pp.25-30(US), |
| #Pages | 6 |
| Date of Issue | 2018-10-26 (US) |