| Presentation | 2018-11-01 Effect on nitrogen doping to ZnO films of nitrogen radical supply generated on Ir catalyst surface Taro Saito, Yuki Adachi, Ryuta Iba, Shotaro Ono, Koichiro Oishi, Hironori Katagiri, Kanji Yasui, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The large bandgap and large exciton binding energy of ZnO have recently stimulated intensive research into optoelectronic device applications, such as light-emitting diodes and laser diodes in the ultraviolet region. We previously developed a new chemical vapor deposition method for ZnO film growth using a catalytic reaction over Pt-nanoparticles between hydrogen and oxygen. ZnO films grown on a-plane sapphire substrates using this method exhibited excellent optical and electronic properties. In order to fabricate ZnO-based light-emitting diodes and laser diodes, preparation of p-type ZnO films is required. In the present study, we have attempted nitrogen doping of ZnO films by decomposition of NO gas using a heated Ir wire during film growth. In X-ray photoelectron spectra, multiple overlapping N-1s peaks were observed from 395 to 406 eV. By deconvolving the spectra, components such as Zn-N, N-N, N-H, and NOx were identified. The relative intensity of the Zn-N peak at 395.5?361.1 eV increased when the heated Ir wire was used to decompose the NO gas. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | catalytic reaction / high-temperature H2O beam / Ir hot-wire / nitrogen doping |
| Paper # | CPM2018-42 |
| Date of Issue | 2018-10-25 (CPM) |
| Conference Information | |
| Committee | CPM / IEE-MAG |
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| Conference Date | 2018/11/1(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Machinaka campus Nagaoka |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Functional materials (semiconductors, magnetic materials, dielectric materials, transparent conductors, semiconductors, etc.) Thin film processes / materials / devices, etc. |
| Chair | Fumihiko Hirose(Yamagata Univ.) / Masahiro Yamaguchi(Tohoku Univ.) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) / Gaku Ohara(Meiji Univ.) / Keiji Yamada(Toshiba) |
| Secretary | Mayumi Takeyama(Toyohashi Univ. of Tech.) / Gaku Ohara(NTT) / Keiji Yamada |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Meeting on Magnetics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect on nitrogen doping to ZnO films of nitrogen radical supply generated on Ir catalyst surface |
| Sub Title (in English) | |
| Keyword(1) | catalytic reaction |
| Keyword(2) | high-temperature H2O beam |
| Keyword(3) | Ir hot-wire |
| Keyword(4) | nitrogen doping |
| 1st Author's Name | Taro Saito |
| 1st Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. of Tech.) |
| 2nd Author's Name | Yuki Adachi |
| 2nd Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. of Tech.) |
| 3rd Author's Name | Ryuta Iba |
| 3rd Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. of Tech.) |
| 4th Author's Name | Shotaro Ono |
| 4th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. of Tech.) |
| 5th Author's Name | Koichiro Oishi |
| 5th Author's Affiliation | National Institute of Technology, Nagaoka College(Nat. Inst. Tech., Nagaoka Coll.) |
| 6th Author's Name | Hironori Katagiri |
| 6th Author's Affiliation | National Institute of Technology, Nagaoka College(Nat. Inst. Tech., Nagaoka Coll.) |
| 7th Author's Name | Kanji Yasui |
| 7th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. of Tech.) |
| Date | 2018-11-01 |
| Paper # | CPM2018-42 |
| Volume (vol) | vol.118 |
| Number (no) | CPM-276 |
| Page | pp.pp.5-9(CPM), |
| #Pages | 5 |
| Date of Issue | 2018-10-25 (CPM) |