| Presentation | 2018-11-29 Development and ion absorption characterization of the zeolite films on flexible film using atomic layer deposition Yoshiharu Mori, Yusuke Noguti, Kensaku Kanomata, Masanori Miura, Bashir A. Arima, Shigeru Kubota, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | ED2018-38,CPM2018-72,LQE2018-92 |
| Date of Issue | 2018-11-22 (ED, CPM, LQE) |
| Conference Information | |
| Committee | ED / LQE / CPM |
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| Conference Date | 2018/11/29(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Inst. tech. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Nitride Semiconductor Devices, Materials, Related Technologies |
| Chair | Kunio Tsuda(Toshiba) / Kiichi Hamamoto(Kyusyu Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Vice Chair | Michihiko Suhara(TMU) / Hiroshi Aruga(Mitsubishi Electric) / Mayumi Takeyama(Kitami Inst. of Tech.) |
| Secretary | Michihiko Suhara(NICT) / Hiroshi Aruga(Saga Univ.) / Mayumi Takeyama(SEI) |
| Assistant | Tatsuya Iwata(TUT) / Junji Kotani(Fjitsu Lab.) / Masaya Nagai(Osaka Univ.) / Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development and ion absorption characterization of the zeolite films on flexible film using atomic layer deposition |
| Sub Title (in English) | |
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| 1st Author's Name | Yoshiharu Mori |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 2nd Author's Name | Yusuke Noguti |
| 2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 3rd Author's Name | Kensaku Kanomata |
| 3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 4th Author's Name | Masanori Miura |
| 4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 5th Author's Name | Bashir A. Arima |
| 5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 6th Author's Name | Shigeru Kubota |
| 6th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 7th Author's Name | Fumihiko Hirose |
| 7th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| Date | 2018-11-29 |
| Paper # | ED2018-38,CPM2018-72,LQE2018-92 |
| Volume (vol) | vol.118 |
| Number (no) | ED-330,CPM-331,LQE-332 |
| Page | pp.pp.27-30(ED), pp.27-30(CPM), pp.27-30(LQE), |
| #Pages | 4 |
| Date of Issue | 2018-11-22 (ED, CPM, LQE) |