Presentation | 2018-11-01 Observation of surface reaction in room temperature zinc oxide ALD Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Fumihiko Hirose, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | CPM2018-44 |
Date of Issue | 2018-10-25 (CPM) |
Conference Information | |
Committee | CPM / IEE-MAG |
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Conference Date | 2018/11/1(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Machinaka campus Nagaoka |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Functional materials (semiconductors, magnetic materials, dielectric materials, transparent conductors, semiconductors, etc.) Thin film processes / materials / devices, etc. |
Chair | Fumihiko Hirose(Yamagata Univ.) / Masahiro Yamaguchi(Tohoku Univ.) |
Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) / Gaku Ohara(Meiji Univ.) / Keiji Yamada(Toshiba) |
Secretary | Mayumi Takeyama(Toyohashi Univ. of Tech.) / Gaku Ohara(NTT) / Keiji Yamada |
Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
Paper Information | |
Registration To | Technical Committee on Component Parts and Materials / Technical Meeting on Magnetics |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Observation of surface reaction in room temperature zinc oxide ALD |
Sub Title (in English) | |
Keyword(1) | |
Keyword(2) | |
Keyword(3) | |
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1st Author's Name | Kazuki Yoshida |
1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
2nd Author's Name | Kentaro Saito |
2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
3rd Author's Name | Masanori Miura |
3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
4th Author's Name | Kensaku Kanomata |
4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
5th Author's Name | Fumihiko Hirose |
5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
Date | 2018-11-01 |
Paper # | CPM2018-44 |
Volume (vol) | vol.118 |
Number (no) | CPM-276 |
Page | pp.pp.15-19(CPM), |
#Pages | 5 |
Date of Issue | 2018-10-25 (CPM) |