| Presentation | 2018-11-01 Observation of surface reaction in room temperature zinc oxide ALD Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | CPM2018-44 |
| Date of Issue | 2018-10-25 (CPM) |
| Conference Information | |
| Committee | CPM / IEE-MAG |
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| Conference Date | 2018/11/1(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Machinaka campus Nagaoka |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Functional materials (semiconductors, magnetic materials, dielectric materials, transparent conductors, semiconductors, etc.) Thin film processes / materials / devices, etc. |
| Chair | Fumihiko Hirose(Yamagata Univ.) / Masahiro Yamaguchi(Tohoku Univ.) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) / Gaku Ohara(Meiji Univ.) / Keiji Yamada(Toshiba) |
| Secretary | Mayumi Takeyama(Toyohashi Univ. of Tech.) / Gaku Ohara(NTT) / Keiji Yamada |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Meeting on Magnetics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of surface reaction in room temperature zinc oxide ALD |
| Sub Title (in English) | |
| Keyword(1) | |
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| 1st Author's Name | Kazuki Yoshida |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 2nd Author's Name | Kentaro Saito |
| 2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 3rd Author's Name | Masanori Miura |
| 3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 4th Author's Name | Kensaku Kanomata |
| 4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 5th Author's Name | Fumihiko Hirose |
| 5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| Date | 2018-11-01 |
| Paper # | CPM2018-44 |
| Volume (vol) | vol.118 |
| Number (no) | CPM-276 |
| Page | pp.pp.15-19(CPM), |
| #Pages | 5 |
| Date of Issue | 2018-10-25 (CPM) |