Presentation 2018-11-29
Scanning internal photoemission microscopy measurements of n-GaN Schottky contacts under applying voltage
Kenji Shiojima, Masataka Maeda, Tomoyoshi Mishima,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We applied scanning internal photoemission microscopy (SIPM) method to characterize the initial stage of the degradation by in-situ applying voltage stress. For the contacts with a slightly larger reverse current of around a pA order at -50 V, the photocurrent (Y) maps were also uniform at Vbias =0 V, but over Vbias = -36 V, the Y was intensively increased at small spots. After such SIPM measurements, the both forward and reverse I-V characteristics became leaky, and in the microscope image of the electrode, dark spots appeared in the same pattern as the Y map. We can conclude that the small portions of the electrode were degraded upon the SIPM measurement at Vbias = -36 V, and the leakage paths with lower Schottky barrier height were formed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaN / Schottky contacts / scanning internal photoemission microscopy / degradation by applying voltage stress
Paper # ED2018-36,CPM2018-70,LQE2018-90
Date of Issue 2018-11-22 (ED, CPM, LQE)

Conference Information
Committee ED / LQE / CPM
Conference Date 2018/11/29(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Nagoya Inst. tech.
Topics (in Japanese) (See Japanese page)
Topics (in English) Nitride Semiconductor Devices, Materials, Related Technologies
Chair Kunio Tsuda(Toshiba) / Kiichi Hamamoto(Kyusyu Univ.) / Fumihiko Hirose(Yamagata Univ.)
Vice Chair Michihiko Suhara(TMU) / Hiroshi Aruga(Mitsubishi Electric) / Mayumi Takeyama(Kitami Inst. of Tech.)
Secretary Michihiko Suhara(NICT) / Hiroshi Aruga(Saga Univ.) / Mayumi Takeyama(SEI)
Assistant Tatsuya Iwata(TUT) / Junji Kotani(Fjitsu Lab.) / Masaya Nagai(Osaka Univ.) / Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.)

Paper Information
Registration To Technical Committee on Electron Devices / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Scanning internal photoemission microscopy measurements of n-GaN Schottky contacts under applying voltage
Sub Title (in English)
Keyword(1) GaN
Keyword(2) Schottky contacts
Keyword(3) scanning internal photoemission microscopy
Keyword(4) degradation by applying voltage stress
Keyword(5)
1st Author's Name Kenji Shiojima
1st Author's Affiliation University of Fukui(Univ. of Fukui)
2nd Author's Name Masataka Maeda
2nd Author's Affiliation University of Fukui(Univ. of Fukui)
3rd Author's Name Tomoyoshi Mishima
3rd Author's Affiliation Hosei University(Hosei Univ.)
Date 2018-11-29
Paper # ED2018-36,CPM2018-70,LQE2018-90
Volume (vol) vol.118
Number (no) ED-330,CPM-331,LQE-332
Page pp.pp.17-20(ED), pp.17-20(CPM), pp.17-20(LQE),
#Pages 4
Date of Issue 2018-11-22 (ED, CPM, LQE)