| Presentation | 2018-10-04 Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators Yui Yamakawa, Takumi Soutome, Rei Karasawa, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the fluid viscosity evaluation based on the QCM (Quartz Crystal Microbalance), the quartz crystal plate is required to be thinned to improve the measurement sensitivity. The QCM, however, becomes to be fragile due to thinning. Sensitive measurement without cracking of the piezoelectric layer can be expected by using the SMR (Solidly Mounted Resonator). In the previous study, however, the quasi-shear mode electromechanical coupling k’15 was only 1.7%. Therefore, we propose the fluid viscosity evaluation with the SMR based on the c-axis tilted ScAlN thin film. k’15^2 of the 48° c-axis tilted ScAlN film is determined as 13.0%. In addition, anti-resonant frequency shifts with changing in glycerin concentration were observed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Viscosity sensor / ScAlN film / TSM / QCM |
| Paper # | US2018-53 |
| Date of Issue | 2018-09-27 (US) |
| Conference Information | |
| Committee | US |
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| Conference Date | 2018/10/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Shinichi Takeuchi(Toin Univ. of Yokohama) |
| Vice Chair | Minoru Kurosawa(Tokyo Inst. of Tech.) / Jun Kondo(Shizuoka Univ.) |
| Secretary | Minoru Kurosawa(Univ. of Tokyo) / Jun Kondo(Kanagawa Univ.) |
| Assistant | Daisuke Koyama(Doshisha Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators |
| Sub Title (in English) | |
| Keyword(1) | Viscosity sensor |
| Keyword(2) | ScAlN film |
| Keyword(3) | TSM |
| Keyword(4) | QCM |
| 1st Author's Name | Yui Yamakawa |
| 1st Author's Affiliation | Waseda University(Waseda Univ.) |
| 2nd Author's Name | Takumi Soutome |
| 2nd Author's Affiliation | Waseda University(Waseda Univ.) |
| 3rd Author's Name | Rei Karasawa |
| 3rd Author's Affiliation | Waseda University(Waseda Univ.) |
| 4th Author's Name | Takahiko Yanagitani |
| 4th Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2018-10-04 |
| Paper # | US2018-53 |
| Volume (vol) | vol.118 |
| Number (no) | US-229 |
| Page | pp.pp.25-29(US), |
| #Pages | 5 |
| Date of Issue | 2018-09-27 (US) |