Presentation | 2018-10-17 New piezoelectric materials by RF sputtering process and applications to sensor Fuminobu Imaizumi, kousuke Yanagida, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2018-53 |
Date of Issue | 2018-10-10 (SDM) |
Conference Information | |
Committee | SDM |
---|---|
Conference Date | 2018/10/17(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Niche, Tohoku Univ. |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Process Science and New Process Technology |
Chair | Takahiro Shinada(Tohoku Univ.) |
Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
Secretary | Hiroshige Hirano(Shizuoka Univ.) |
Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | New piezoelectric materials by RF sputtering process and applications to sensor |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Fuminobu Imaizumi |
1st Author's Affiliation | National Institute of Technology, Oyama College(NIT, Oyama College) |
2nd Author's Name | kousuke Yanagida |
2nd Author's Affiliation | *(*) |
Date | 2018-10-17 |
Paper # | SDM2018-53 |
Volume (vol) | vol.118 |
Number (no) | SDM-241 |
Page | pp.pp.7-10(SDM), |
#Pages | 4 |
Date of Issue | 2018-10-10 (SDM) |