Presentation 2018-10-03
Fabrication of TiO2-dispersed VOx thin films by MOD
Van Nhu Hai, Kohei Maeda, Masami Kawahara, Tsuyoshi Samura, Takashi Tachiki, Takashi Uchida,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) To realize a bolometer detector with a high responsivity operating in a wide temperature range, we fabricated thinfilms by firing TiO2-V2O5 precursor films with changing the molar ratio of Ti/V (xm) by MOD. From the measurement of XRDfor the films obtained by firing the precursor films in O2 atmosphere, it was found that TiO2 nanoparticles were coexisted inV2O5 and that the obtained films were TiO2-dispersed V2O5 films. Precipitates of TiO2 were observed on the surface of the filmfor the xm higher than 10 %. Then, these films were thermally reduced by the heat treatment under a low pressure of 1.2 Pa. TheR-T characteristics of the films indicated the phase transition specified with VO2(M) and the resistance change and the hysteresisloop width decreased with increasing xm.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MOD / VO2 thin films / TiO2-dispersed thin films
Paper # CPM2018-37
Date of Issue 2018-09-26 (CPM)

Conference Information
Committee CPM
Conference Date 2018/10/3(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Kikai-Shinko-Kaikan Bldg.
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Fumihiko Hirose(Yamagata Univ.)
Vice Chair Mayumi Takeyama(Kitami Inst. of Tech.)
Secretary Mayumi Takeyama(Toyohashi Univ. of Tech.)
Assistant Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.)

Paper Information
Registration To Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of TiO2-dispersed VOx thin films by MOD
Sub Title (in English)
Keyword(1) MOD
Keyword(2) VO2 thin films
Keyword(3) TiO2-dispersed thin films
1st Author's Name Van Nhu Hai
1st Author's Affiliation National Defense Academy(NDA)
2nd Author's Name Kohei Maeda
2nd Author's Affiliation National Defense Academy(NDA)
3rd Author's Name Masami Kawahara
3rd Author's Affiliation Kojundo Chemical Labotary(Kojundo Chemical Lab)
4th Author's Name Tsuyoshi Samura
4th Author's Affiliation Kojundo Chemical Labotary(Kojundo Chemical Lab)
5th Author's Name Takashi Tachiki
5th Author's Affiliation National Defense Academy(NDA)
6th Author's Name Takashi Uchida
6th Author's Affiliation National Defense Academy(NDA)
Date 2018-10-03
Paper # CPM2018-37
Volume (vol) vol.118
Number (no) CPM-228
Page pp.pp.1-6(CPM),
#Pages 6
Date of Issue 2018-09-26 (CPM)