Presentation 2018-08-09
Kinetic inductance in superconducting TiN coplanar waveguide resonator
Wei Qiu, Hirotaka Terai,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Precision design and fabrication of high quality superconducting quantum qubit (qubit) are both essential requirements for physical implantation such devices in quantum computing and quantum information applications. Among which, we have demonstrated low-loss coplanar waveguide resonator (CPWR) made of superconducting TiN films. In this research report, we evaluate the kinetic inductance Lk in such device by measuring the resonance shift. It shows that both kinetic inductance Lk and London penetration depth $lamda$? are highly dependent on the deposition condition of the TiN film. In comparison, CPW resonator made of (200)-oriented TiN film shows much smaller shift in resonant frequency due to its smaller kinetic inductance contribution than polycrystalline TiN. Meanwhile, we also evaluate the penetration depth from resonator geometric configurations.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Titanium nitriteKinetic InductancePenetration depthCoplanar waveguide resonatorSuperconducting qubit
Paper # SCE2018-10
Date of Issue 2018-08-02 (SCE)

Conference Information
Committee SCE
Conference Date 2018/8/9(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Toyohashi University of Technology
Topics (in Japanese) (See Japanese page)
Topics (in English) Detector, SQUID, etc.
Chair Hiroaki Myoren(Saitama Univ.)
Vice Chair
Secretary (Yokohama National Univ.)
Assistant Hiroyuki Akaike(Daido Univ.)

Paper Information
Registration To Technical Committee on Superconductive Electronics
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Kinetic inductance in superconducting TiN coplanar waveguide resonator
Sub Title (in English)
Keyword(1) Titanium nitriteKinetic InductancePenetration depthCoplanar waveguide resonatorSuperconducting qubit
1st Author's Name Wei Qiu
1st Author's Affiliation National Institute of Information and Communications Technology(NICT)
2nd Author's Name Hirotaka Terai
2nd Author's Affiliation National Institute of Information and Communications Technology(NICT)
Date 2018-08-09
Paper # SCE2018-10
Volume (vol) vol.118
Number (no) SCE-178
Page pp.pp.19-22(SCE),
#Pages 4
Date of Issue 2018-08-02 (SCE)