Presentation 2018-07-13
[Invited Talk] Perspective of optical modulator using Si hybrid MOS phase shifter
Mitsuru Takenaka, Shinichi Takagi,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have proposed a Si hybrid MOS structure where a thin III-V semiconductor membrane is bonded on a Si waveguide with a gate dielectric for optical modulators. Electron accumulation at the III-V MOS interface induced by an application of a gate voltage enables us to use the electron-induced refractive index change in the III-V semiconductor. As a result, we have successfully achieved efficient low-loss optical phase modulation. The phase modulation efficiency is 0.05 Vcm, which is approximately 10 times better than that of a depletion-based Si optical modulator. Moreover, The optical loss accompanying with phase modulation is 10 times smaller than that of a Si optical modulator, improving optical modulation amplitude significantly. We discuss the potential of a Si hybrid MOS optical modulator beyond 100 Gbps application.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Si photonics / Optical Modulator / III-V Semiconductor / Wafer Bonding
Paper # LQE2018-31
Date of Issue 2018-07-05 (LQE)

Conference Information
Committee LQE
Conference Date 2018/7/12(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Kiichi Hamamoto(Kyusyu Univ.)
Vice Chair Hiroshi Aruga(Mitsubishi Electric)
Secretary Hiroshi Aruga(SEI)
Assistant Masaya Nagai(Osaka Univ.)

Paper Information
Registration To Technical Committee on Lasers and Quantum Electronics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Perspective of optical modulator using Si hybrid MOS phase shifter
Sub Title (in English)
Keyword(1) Si photonics
Keyword(2) Optical Modulator
Keyword(3) III-V Semiconductor
Keyword(4) Wafer Bonding
1st Author's Name Mitsuru Takenaka
1st Author's Affiliation The University of Tokyo(Univ. Tokyo)
2nd Author's Name Shinichi Takagi
2nd Author's Affiliation The University of Tokyo(Univ. Tokyo)
Date 2018-07-13
Paper # LQE2018-31
Volume (vol) vol.118
Number (no) LQE-129
Page pp.pp.43-46(LQE),
#Pages 4
Date of Issue 2018-07-05 (LQE)