| Presentation | 2018-06-25 [Invited Lecture] Recent progress and problem of Diamond device: Crystal quality of bulk and surface Yukako Kato, Kouhei Takizawa, Toshiharu Makino, Hiromitsu Kato, Masahiko Ogura, Daisuke Takeuchi, Satoshi Yamasaki, Hiroshi Nohira, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2018/6/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Univ. VBL3F |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices and Memories |
| Chair | Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] Recent progress and problem of Diamond device: Crystal quality of bulk and surface |
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| 1st Author's Name | Yukako Kato |
| 1st Author's Affiliation | National Institute of Advance industrial science and technology(AIST) |
| 2nd Author's Name | Kouhei Takizawa |
| 2nd Author's Affiliation | Tokyo City University(Tokyo City Univ.) |
| 3rd Author's Name | Toshiharu Makino |
| 3rd Author's Affiliation | National Institute of Advance industrial science and technology(AIST) |
| 4th Author's Name | Hiromitsu Kato |
| 4th Author's Affiliation | National Institute of Advance industrial science and technology(AIST) |
| 5th Author's Name | Masahiko Ogura |
| 5th Author's Affiliation | National Institute of Advance industrial science and technology(AIST) |
| 6th Author's Name | Daisuke Takeuchi |
| 6th Author's Affiliation | National Institute of Advance industrial science and technology(AIST) |
| 7th Author's Name | Satoshi Yamasaki |
| 7th Author's Affiliation | National Institute of Advance industrial science and technology(AIST) |
| 8th Author's Name | Hiroshi Nohira |
| 8th Author's Affiliation | Tokyo City University(Tokyo City Univ.) |
| Date | 2018-06-25 |
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| Volume (vol) | vol.118 |
| Number (no) | SDM-110 |
| Page | pp.pp.-(), |
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