| Presentation | 2018-06-25 Comparative study of SiO2/GaN interface structures and properties between Ar and He as a mixture gas with oxygen for remote plasma chemical vapor deposition Nguyen Xuan Truyen, Noriyuki Taoka, Akio Ohta, Hisashi Yamada, Tokio Takahashi, Mitsuhisa Ikeda, Makihara Katsunori, Mitsuaki Shimizu, Seiichi Miyazaki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2018-17 |
| Date of Issue | 2018-06-18 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2018/6/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Univ. VBL3F |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices and Memories |
| Chair | Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Comparative study of SiO2/GaN interface structures and properties between Ar and He as a mixture gas with oxygen for remote plasma chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Nguyen Xuan Truyen |
| 1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 2nd Author's Name | Noriyuki Taoka |
| 2nd Author's Affiliation | AIST-NU GaN-OIL(AIST-NU GaN-OIL) |
| 3rd Author's Name | Akio Ohta |
| 3rd Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 4th Author's Name | Hisashi Yamada |
| 4th Author's Affiliation | AIST-NU GaN-OIL(AIST-NU GaN-OIL) |
| 5th Author's Name | Tokio Takahashi |
| 5th Author's Affiliation | AIST-NU GaN-OIL(AIST-NU GaN-OIL) |
| 6th Author's Name | Mitsuhisa Ikeda |
| 6th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 7th Author's Name | Makihara Katsunori |
| 7th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 8th Author's Name | Mitsuaki Shimizu |
| 8th Author's Affiliation | AIST-NU GaN-OIL(AIST-NU GaN-OIL) |
| 9th Author's Name | Seiichi Miyazaki |
| 9th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| Date | 2018-06-25 |
| Paper # | SDM2018-17 |
| Volume (vol) | vol.118 |
| Number (no) | SDM-110 |
| Page | pp.pp.5-9(SDM), |
| #Pages | 5 |
| Date of Issue | 2018-06-18 (SDM) |