| Presentation | 2018-06-15 Routing Algorithm to Achieve Circular Wire for SIM-Type SADP Shun Akatsuka, Kunihiro Fujiyoshi, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Wires of Spacer-Is-Metal (SIM) type Self-Aligned Double Patterning (SADP) is peculiar since wires is circular when dummy wires are appended. Therefore any wire cannot be branched and the design of such wires is very difficult. We revealed a sufficient condition for the existence of routing for interconnection requirements. We proposed a routing algorithm for interconnection requirements which satisfy the condition. Finally, we relax the sufficient condition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Double Patterning / SADP / Spacer-Is-Metal type SADP / Sufficient condition |
| Paper # | CAS2018-30,VLD2018-33,SIP2018-50,MSS2018-30 |
| Date of Issue | 2018-06-07 (CAS, VLD, SIP, MSS) |
| Conference Information | |
| Committee | CAS / SIP / MSS / VLD |
|---|---|
| Conference Date | 2018/6/14(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hokkaido Univ. (Frontier Research in Applied Sciences Build.) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | System and Signal Processing, etc |
| Chair | Hideaki Okazaki(Shonan Inst. of Tech.) / Shogo Muramatsu(Niigata Univ.) / Morikazu Nakamura(Univ. of Ryukyus) / Noriyuki Minegishi(Mitsubishi Electric) |
| Vice Chair | Taizo Yamawaki(Hitachi) / Naoyuki Aikawa(TUS) / Kazunori Hayashi(Osaka City Univ) / Shigemasa Takai(Osaka Univ.) / Nozomu Togawa(Waseda Univ.) |
| Secretary | Taizo Yamawaki(Shonan Inst. of Tech.) / Naoyuki Aikawa(Hitachi) / Kazunori Hayashi(Takushoku Univ.) / Shigemasa Takai(Hiroshima Univ.) / Nozomu Togawa(Toshiba) |
| Assistant | Motoi Yamaguchi(Renesas Electronics) / / Hideki Kinjo(Okinawa Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Circuits and Systems / Technical Committee on Signal Processing / Technical Committee on Mathematical Systems Science and its applications / Technical Committee on VLSI Design Technologies |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Routing Algorithm to Achieve Circular Wire for SIM-Type SADP |
| Sub Title (in English) | |
| Keyword(1) | Double Patterning |
| Keyword(2) | SADP |
| Keyword(3) | Spacer-Is-Metal type SADP |
| Keyword(4) | Sufficient condition |
| 1st Author's Name | Shun Akatsuka |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| 2nd Author's Name | Kunihiro Fujiyoshi |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| Date | 2018-06-15 |
| Paper # | CAS2018-30,VLD2018-33,SIP2018-50,MSS2018-30 |
| Volume (vol) | vol.118 |
| Number (no) | CAS-82,VLD-83,SIP-84,MSS-85 |
| Page | pp.pp.155-160(CAS), pp.155-160(VLD), pp.155-160(SIP), pp.155-160(MSS), |
| #Pages | 6 |
| Date of Issue | 2018-06-07 (CAS, VLD, SIP, MSS) |