| Presentation | 2018-04-20 Low temperature atomic layer deposition of yttrium oxide using plasma excited humidified argon Kentaro Saito, Kensaku Kanomata, Masanori Miura, Bashir A. Arima, Kubota Shigeru, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2018-8 |
| Date of Issue | 2018-04-12 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2018/4/19(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Kunio Tsuda(Toshiba) |
| Vice Chair | Michihiko Suhara(TMU) |
| Secretary | Michihiko Suhara(New JRC) |
| Assistant | Toshiyuki Oishi(Saga Univ.) / Tatsuya Iwata(TUT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low temperature atomic layer deposition of yttrium oxide using plasma excited humidified argon |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Kentaro Saito |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 2nd Author's Name | Kensaku Kanomata |
| 2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 3rd Author's Name | Masanori Miura |
| 3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 4th Author's Name | Bashir A. Arima |
| 4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 5th Author's Name | Kubota Shigeru |
| 5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 6th Author's Name | Fumihiko Hirose |
| 6th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| Date | 2018-04-20 |
| Paper # | ED2018-8 |
| Volume (vol) | vol.118 |
| Number (no) | ED-9 |
| Page | pp.pp.29-32(ED), |
| #Pages | 4 |
| Date of Issue | 2018-04-12 (ED) |