| Presentation | 2018-04-07 [Invited Talk] High Performance and Functional Group-Ⅳ Thin-Film Transistors Akito Hara, Hiroki Utsumi, Naoki Nishiguchi, Ryo Miyazaki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated self-aligned planar double-gate (DG) or self-aligned planar four-terminal (4T) polycrystalline germanium (poly-Ge) and polycrystalline germanium-tin (poly-Ge1-xSnx) thin-film transistors (TFTs) via copper metal-induced crystallization (Cu-MIC). Furthermore, we have fabricated top-gate poly-Ge TFTs via Cu-MIC on spin-coated plastic films. In these TFTs, the parasitic resistance of the source drains (SD) was reduced via aluminum-induced lateral metallization of the SD. In this article, we report the performance of these TFTs. In addition, we briefly comment on the performance of 4T polycrystalline silicon TFTs and complementary metal-oxide-semiconductor inverters. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ge / Ge1-xSnx / Si / TFT / Plastic / Flexible |
| Paper # | SDM2018-5,OME2018-5 |
| Date of Issue | 2018-03-30 (SDM, OME) |
| Conference Information | |
| Committee | SDM / OME |
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| Conference Date | 2018/4/6(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawaken Seinen Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. |
| Chair | Tatsuya Kunikiyo(Renesas) / Tatsuo Mori(Aichi Inst. of Tech.) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) / Yutaka Majima(Tokyo Inst. of Tech.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) / Yutaka Majima(Renesas) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) / Hirotake Kajii(Osaka Univ.) / Toshihiko Kaji(Tokyo Univ. of Agriculture and Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] High Performance and Functional Group-Ⅳ Thin-Film Transistors |
| Sub Title (in English) | |
| Keyword(1) | Ge |
| Keyword(2) | Ge1-xSnx |
| Keyword(3) | Si |
| Keyword(4) | TFT |
| Keyword(5) | Plastic |
| Keyword(6) | Flexible |
| 1st Author's Name | Akito Hara |
| 1st Author's Affiliation | Tohoku Gakuin University(Tohoku Gakuin Univ.) |
| 2nd Author's Name | Hiroki Utsumi |
| 2nd Author's Affiliation | Tohoku Gakuin University(Tohoku Gakuin Univ.) |
| 3rd Author's Name | Naoki Nishiguchi |
| 3rd Author's Affiliation | Tohoku Gakuin University(Tohoku Gakuin Univ.) |
| 4th Author's Name | Ryo Miyazaki |
| 4th Author's Affiliation | Tohoku Gakuin University(Tohoku Gakuin Univ.) |
| Date | 2018-04-07 |
| Paper # | SDM2018-5,OME2018-5 |
| Volume (vol) | vol.118 |
| Number (no) | SDM-1,OME-2 |
| Page | pp.pp.19-24(SDM), pp.19-24(OME), |
| #Pages | 6 |
| Date of Issue | 2018-03-30 (SDM, OME) |